A Silicon Micromachined Graphene Beam Resonant Gyroscope
A silicon micromachine and graphene technology, applied in gyroscope/steering sensing equipment, instruments, surveying and navigation, etc., achieves the effect of low cost, low drift rate and strong impact resistance
Active Publication Date: 2019-12-17
BEIHANG UNIV
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However, the basic theoretical research and key technological breakthroughs of graphene beam resonant gyroscopes are mostly based on experimental theory. Specifically, graphene is used as a sensitive structure for research on resonance characteristics. Resonant gyroscopes with differential composite sensitive outputs are still in the blank.
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[0018] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0019] Such as Figure 1-3 As shown, a silicon micromachined graphene beam resonant gyroscope angular velocity sensor includes a glass substrate 1, a transmission beam 2, a lever transmission part 3, a fixed mass drive comb tooth 4, a gyro mass 5, a first graphene Resonant beam 6 , second graphene resonant beam 7 and frame 8 .
[0020] The structure of the gyroscope is simple in shape, and the thickness of the four parts of the transmission beam 2, the lever transmission part 3, the fixed mass drive comb teeth 4 and the gyro mass 5 on the glass substrate 1 has no effect on the natural frequency of the overall structure, so it is selected Domestic relatively mature bulk silicon processing technology. By using silicon-glass anodic bonding and silicon deep etching process technology, large-scale production can be realized.
[0021] Select N-typ...
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The invention discloses a micro-silicon mechanical graphene beam resonance gyro which comprises a glass substrate, transfer beams, lever transfer parts, fixed mass block driving comb teeth, a gyro mass block, a first graphene resonance beam, a second graphene resonance beam and a frame. The graphene resonance beams serve as secondary sensitive structures and are used for being indirectly sensitive to change of axial stress acting on the transfer beams. The graphene resonance beams serve as resonance sensitive structures; in a process that the graphene resonance beams located in axisymmetrical positions sense change of an axial coriolis force, one graphene resonance beam is in an axial tension state and the other graphene resonance beam is in an axial compression state (within a resonance frequency range); and the two graphene resonance beams have the same sensitive capacity to a temperature field and the like. The characteristics of small size, flexible structure, high rupture strength and high mechanical quality factor of the graphene resonance beams can be fully exerted by tightly combining the two symmetrical graphene resonance beams and a micro-silicon mechanical gyro; and differential measurement, high sensitivity and high measurement accuracy of the micro-silicon mechanical graphene beam resonance gyro are realized.
Description
technical field [0001] The invention belongs to the technical field of micro / nano electromechanical systems, and in particular relates to a silicon micromachined graphene beam resonant gyroscope. Background technique [0002] As a sensor for measuring the angular velocity of the measured object, the gyroscope can be used to distinguish the angle of rotation of the object per unit time, and plays a very important role in the fields of attitude control and navigation and positioning. Due to the disadvantages of traditional mechanical gyroscopes such as large size, high cost, and unsuitability for mass production, silicon micromechanical gyroscopes have been widely used due to their small size, light weight, low cost, low power consumption, high reliability, and large measurement range. Gyro stands out in the manufacture of gyroscopes and has been widely used in civilian and military fields. In 1988, the Draper Laboratory in the United States designed and processed the first s...
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IPC IPC(8): G01C19/56
CPCG01C19/5621G01C19/5656G01C19/5712
Inventor 樊尚春卢阳邢维巍
Owner BEIHANG UNIV