Chip structure of surface acoustic wave sensor and sensor

A sensor chip and surface acoustic wave technology, applied in the field of surface acoustic wave sensor devices, can solve the problems of radio frequency signal attenuation, weak signal, and restrictions on the reading and writing distance of SAW sensors, and achieve the effect of improving the reading and writing range and receiving signals far away

Active Publication Date: 2017-09-08
INST OF ACOUSTICS CHINESE ACAD OF SCI
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the energy of the SAW sensor comes from the reader, and the radio frequency signal is severely attenuated in the atmosphere, the received signal is very weak, and the energy generated by the piezoelectric effect is very weak, which seriously restricts the reading and writing distance of the SAW sensor.
At present, the longest distance that SAW wireless sensors can achieve is 6 meters, which cannot fully meet the needs of the sensor market.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Chip structure of surface acoustic wave sensor and sensor
  • Chip structure of surface acoustic wave sensor and sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

[0015] figure 1 It is a schematic structural diagram of a surface acoustic wave sensor chip provided by an embodiment of the present invention. Such as figure 1 As shown, the chip structure of the surface acoustic wave sensor includes a piezoelectric substrate 21 and an interdigital transducer 20; wherein, the interdigital transducer 20 includes a bus bar 22 and an electrode part 23, and the electrode part 23 is arranged as a pointed corner structure;

[0016] The piezoelectric substrate 21 is used to accumulate electrical energy; the interdigital transducer 20 is used to convert electrical energy into mechanical energy, modulate the acoustic wave signal on the propagation path, and convert mechanical energy into electrical energy through the inverse piezoelectric effect to provide surface acoustic wave sensors ener...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a chip structure of an surface acoustic wave sensor. The structure comprises a piezoelectric substrate (21) and an interdigital transducer (20), wherein the interdigital transducer (20) comprises a bus bar (22) and an electrode part (23); the electrode part (23) adopts a sharp corner structure; the piezoelectric substrate (21) is used for accumulating electric energy; and the interdigital transducer (20) is used for converting the electric energy into mechanical energy, modulating an acoustic wave signal on a propagation path, converting the mechanical energy into the electric energy through an inverse piezoelectric effect and providing the energy for the surface acoustic wave sensor. According to the structure, the reading-writing range of the SAW sensor can be greatly expanded, so that longer-distance receiving is realized and the demands of a sensor market on the reading-writing range are met.

Description

technical field [0001] The invention relates to the field of signal and information processing, in particular to a surface acoustic wave sensor device. Background technique [0002] Surface Acoustic Wave (SAW, Surface Acoustic Wave) sensors are widely used in the monitoring of many physical quantities such as pressure, temperature, and strain due to their good performance, small size, and low cost. [0003] A general wireless passive SAW sensor is composed of a sensor chip and a reader. The sensor chip receives the radio frequency signal emitted by the reader through the antenna. Based on the piezoelectric effect, the interdigital transducer of the sensor chip converts electrical energy into mechanical energy, modulates the acoustic signal on the propagation path, and converts mechanical energy into electrical energy through the inverse piezoelectric effect. , to provide energy for the sensor. However, since the energy of the SAW sensor comes from the reader, and the radio...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G06K19/07G01D5/48H02N2/18
CPCG01D5/48G06K19/0711H02N2/18
Inventor 李红浪蔡飞达李鹏旭柯亚兵田亚会程利娜
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products