Sic-coated carbon composite material

Abstract

Provided is an SiC-coated carbon composite material comprising a graphite substrate and a CVD-SiC coating that coats the graphite substrate. The porosity of the central core of the graphite substrate is 12-20%, and surrounding the central core of the graphite substrate is an SiC permeable layer extending from the CVD-SiC coating. The SiC permeable layer is composed of a plurality of regions disposed such that there is a stepped decrease in Si content in order from a first surface on the side of the CVD-SiC coating toward a second surface on the side of the graphite substrate.

Description

technical field [0001] The present invention relates to a SiC-coated carbon composite material comprising a graphite base material and a SiC coating covering the graphite base material, and a method for producing the same. Background technique [0002] Structural materials used at high temperatures, such as parts for semiconductor manufacturing equipment and parts for heating furnaces, require heat resistance, chemical stability, strength, and the like. As such a material, graphite is widely used. Although graphite has excellent heat resistance, chemical stability, and strength, it is difficult to resist the reaction with oxygen and is prone to oxidative consumption; it is soft and easy to wear; it is reactive with hydrogen, ammonia, etc. at high temperatures; etc., it is not a panacea Material. [0003] In order to compensate for such shortcomings of graphite, a ceramic composite material in which a ceramic coating such as SiC is formed on the surface of graphite is widel...

AI Technical Summary

Problems solved by technology

Although graphite has excellent heat resistance, chemical stability, and strength, it is difficult to resist the reaction with oxygen and is prone to oxidative consumption; it is soft and easy to wear; it is reactive with hydrogen, ammonia, etc. at high temperatures; etc., it is not a panacea Material