Sic-coated carbon composite material
By using a graphite base material with a porosity of 12% to 20% and a stepped SiC permeable layer in SiC-coated graphite parts, the problems of warping and peeling at high temperatures are solved, and the strength and heat resistance of the material are improved.
Inactive Publication Date: 2017-09-26
IBIDEN CO LTD
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Problems solved by technology
Although graphite has excellent heat resistance, chemical stability, and strength, it is difficult to resist the reaction with oxygen and is prone to oxidative consumption; it is soft and easy to wear; it is reactive with hydrogen, ammonia, etc. at high temperatures; etc., it is not a panacea Material
Method used
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Experimental program
Comparison scheme
Effect test
Embodiment
[0132] Next, Examples and Comparative Examples 1 and 2 of the SiC-coated carbon composite material of the present invention will be sequentially described.
[0133]
[0134] In Examples and Comparative Examples 1 and 2, a graphite substrate of 15×15×5 mm was prepared using EX-60 manufactured by Ibiden Corporation. The processing steps are common to Examples and Comparative Examples.
[0135] The porosity of the graphite substrate is 16%, and the true density is 2.20g / cm 3 .
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Abstract
Provided is an SiC-coated carbon composite material comprising a graphite substrate and a CVD-SiC coating that coats the graphite substrate. The porosity of the central core of the graphite substrate is 12-20%, and surrounding the central core of the graphite substrate is an SiC permeable layer extending from the CVD-SiC coating. The SiC permeable layer is composed of a plurality of regions disposed such that there is a stepped decrease in Si content in order from a first surface on the side of the CVD-SiC coating toward a second surface on the side of the graphite substrate.
Description
technical field [0001] The present invention relates to a SiC-coated carbon composite material comprising a graphite base material and a SiC coating covering the graphite base material, and a method for producing the same. Background technique [0002] Structural materials used at high temperatures, such as parts for semiconductor manufacturing equipment and parts for heating furnaces, require heat resistance, chemical stability, strength, and the like. As such a material, graphite is widely used. Although graphite has excellent heat resistance, chemical stability, and strength, it is difficult to resist the reaction with oxygen and is prone to oxidative consumption; it is soft and easy to wear; it is reactive with hydrogen, ammonia, etc. at high temperatures; etc., it is not a panacea Material. [0003] In order to compensate for such shortcomings of graphite, a ceramic composite material in which a ceramic coating such as SiC is formed on the surface of graphite is widel...
Claims
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IPC IPC(8): C04B41/87C01B32/21C04B35/52C23C16/42
CPCC04B41/009C04B41/5059C04B41/87C04B2111/00405C23C16/045C23C16/325C01B32/21C04B35/522C04B38/00C04B41/4531C04B35/52C04B2235/3826C04B2235/425C04B2235/614C04B2235/77
Owner IBIDEN CO LTD
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