Thermometer based on TPoS resonators and temperature measurement method thereof

Abstract

The invention relates to a thermometer based on TPoS resonators and a temperature measurement method thereof. The present temperature measurement system based on the quartz crystal sensor has low stability and large sensor size. The thermometer comprises two TPoS resonators, three operational amplifiers, a frequency mixer, a low-pass filter, a frequency-voltage converter and a load resistor. Different frequency-temperature characteristic curves are presented by two TPoS resonators of different crystal orientations, and the frequency is identical under the calibration temperature. When the temperature changes, the two TPoS resonators have frequency difference, and the variance of the temperature is obtained according to the frequency difference so as to realize temperature measurement. The advantages of the thermometer are that the work frequency of the TPoS resonators can be hundreds of MHz so as to have higher temperature resolution. Besides, the two resonators are adjacent in position and can be integrated with the peripheral circuit through a PCB circuit or a single chip so that the overall area is smaller and the temperature consistency is higher.

Description

technical field [0001] The invention belongs to the technical field of radio frequency communication, in particular to components and parts in a micro-electromechanical system (MEMS), and relates to a thermometer and a temperature measurement method based on a TPoS (thin-film piezoelectric on substrate) resonator. Background technique [0002] A temperature sensor refers to a device that converts a temperature signal into an electrical signal that is easy to transmit and process. With the development of material science and the advancement of technology, more and more temperature measurement methods have emerged and are used in different occasions. Each temperature measurement method has to face accuracy, power consumption, volume, resolution, service life, and work Temperature range, installation reliability and other issues. High-precision and high-reliability measurement is meaningful in various fields. Accurate and stable temperature control in industry will make the pr...

AI Technical Summary

Problems solved by technology

Therefore, the temperature stability of the quartz crystal temperature sensor is not high. At the same time, due to the low natural frequency of the quartz crystal, the resolution of the temperature measurement is limited.

In addition, the quartz temperature sensor needs to use two independent quartz crystals with different cuts, and each crystal needs to be packaged independently, so the size of the quartz temperature sensor is relatively large, and it is difficult to achieve single-chip integration of quartz and CMOS circuits, and it is impossible to achieve miniaturization

Images