Piezoelectric integrated MOEMS scanning raster micromirror

Abstract

The invention discloses a piezoelectric integrated MOEMS scanning raster micromirror and relates to the field of spectrum analysis and micro optical electro mechanical systems. The piezoelectric integrated MOEMS scanning raster micromirror consists of an integrated scanning raster micromirror, a torsion beam, a connecting beam, an angle sensor, a piezoelectric micro driver and a fixing frame. The integrated scanning raster micromirror is based on monotectic orientation (111) silicon substrate, a blazed grating is integrated on the front side, a groove is sapped in the back side, and the diffraction efficiency and device robustness are improved. For achieving large-angle scanning under low-drive voltage, the piezoelectric micro driver and the connecting beam are adopted to amplify drive displacement. For monitoring the motion state of the integrated scanning raster micromirror in real time, the piezoelectric angle sensor is integrally integrated on the connecting beam. The piezoelectric integrated MOEMS scanning raster micromirror is novel and simple in structure and compatible with an integration process, the diffraction efficiency, resolution ratio, robustness and integration level of the scanning raster micromirror can be remarkably improved, and the driving and angle sensing properties of the scanning raster micromirror are improved.

Description

technical field [0001] The invention belongs to the fields of spectral analysis and micro-opto-electromechanical systems, and in particular relates to a piezoelectric integrated MOEMS scanning grating. Background technique [0002] Scanning grating micromirror is a micro spectroscopic scanning device that integrates gratings on the micromirror and has spectroscopic and scanning functions. It is the core component of scanning micro spectrometers and has urgent application requirements in the field of spectral analysis. The scanning grating micromirror based on MOEMS (Micro-Opto-Electro-Mechanical System) technology has significant advantages such as small size, low cost, low power consumption, high precision, and high integration, and it is used as the core element The micro-spectrometer of the device can avoid the use of expensive array detectors, can expand the corresponding spectral range, and has significant advantages such as low cost and high performance. At the same t...

AI Technical Summary

Problems solved by technology

The former often has the problem of static and dynamic deformation of the mirror due to the thinner mirror surface, and limits the size of the mirror surface, thus affecting the resolution of the device; although the latter effectively avoids the problem of mirror surface deformation, but due to the large mirror surface quality and thin beam structure , causing the beam structure to break easily in the impact and vibration of the environment, reducing the stability of the device

Moreover, most of the existing MOEMS scanning grating micromirrors integrate V-groove or rectangular groove gratings on the mirror surface, and the diffraction efficiency is low.

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