The invention discloses a method for preparing a flexible thermosensitive
film material. According to the method, MnCO3
powder, Co2O3
powder, Ni2O3
powder are used as raw materials and subjected to
grinding, screening, synthesizing, fine
grinding, pre-molding forming and
sintering under the
oxygen-enriched
atmosphere to be made into a
ceramic target, a
polyethylene glycol terephthalate sheet and a
polyimide sheet are used as substrates, and an MCNO film is deposited at the
room temperature in a sputtered mode through a
radio frequency magnetron
sputtering method. The method has the advantages that firstly,
sputter deposition is completed at the
room temperature, and the purpose of depositing the MCNO thermosensitive film on the
polyethylene glycol terephthalate substrate, the
polyimide substrate and other organic flexible substrates is achieved; secondly, the MCNO film prepared through the method is low in
specific resistance, and the
negative temperature resistance coefficient is high, so that
responsivity of elements is better increased, and
noise of the elements is better lowered; thirdly, preparation is conducted at the normal temperature, high-temperature heat treatment is not needed,
energy consumption is low, energy is saved, and the environment is protected; and fourthly, the
sputter deposition temperature is low, the method is easily compatible with a Si-based
semiconductor process, and the thermosensitive elements can be directly prepared on Si-based reading circuit chips, so that the cost for preparing thermosensitive type uncooled
infrared focal plane arrays is greatly lowered.