Bipolar resistive random access memory and preparation method thereof

A resistive memory, bipolar technology, applied in electrical components and other directions, can solve problems such as difficult and high-density three-dimensional integration, inability to take advantage of RRAM's scalability advantages, and inability to use RRAM.

Active Publication Date: 2016-08-24
合肥中科微电子创新中心有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The 1T1R structure can effectively solve the problem of crosstalk, but the area of ​​the memory unit mainly depends on the area of ​​the transistor, which cannot take advantage of the excellent scalability of RRAM, and it is difficult to carry out hig

Method used

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  • Bipolar resistive random access memory and preparation method thereof
  • Bipolar resistive random access memory and preparation method thereof
  • Bipolar resistive random access memory and preparation method thereof

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preparation example Construction

[0057] The present invention also provides a method for preparing the bipolar resistive memory, comprising: S1) providing a substrate; S2) forming a lower electrode on the upper surface of the substrate; S3) depositing rectification functional layer; the rectification functional layer is made of Al 2 o 3 、TiO 2 Forming with one or more of MgO; S4) transferring the graphene film to the rectification function layer to form a graphene layer; S5) depositing a resistive medium layer on the graphene layer; S6) forming a graphene layer on the graphene layer; An upper electrode is deposited on the resistive medium layer to obtain a bipolar resistive memory.

[0058] Wherein, the substrate, the lower electrode, the rectifying functional layer, the graphene layer, the resistive medium layer and the upper electrode are all the same as above, and will not be repeated here; see Figure 4 , Figure 4 It is a schematic diagram of the preparation process of the bipolar resistive memory of...

Embodiment 1

[0068] 1.1 Provide substrate SiO 2 / Si.

[0069] 1.2 Deposit metal Pt50nm and Ti10nm on the substrate as the bottom electrode by E-beam evaporation process.

[0070] 1.3 Deposit 3nm Al on the bottom electrode by magnetron sputtering 2 o 3 A rectification functional layer is formed.

[0071] 1.4 Transfer the single-layer graphene obtained by the chemical vapor deposition (CVD) process on the copper sheet to the rectifying functional layer to form a graphene layer by a peeling transfer process.

[0072] 1.5 Deposit 10nm HfO on the graphene layer by magnetron sputtering 2 As a resistive dielectric layer.

[0073] 1.6 Deposit 70nm metal Cu as the upper electrode on the resistive dielectric layer by electron beam evaporation process.

[0074] 1.7 Deposit 10nm metal Au as a protective layer on the upper electrode by electron beam evaporation process.

Embodiment 2

[0076] 2.1 Provide substrate SiO 2 / Si.

[0077] 2.2 Deposit metal Au50nm and Ti10nm on the substrate as the bottom electrode by E-beam evaporation process.

[0078] 2.3 Deposit 3nm MgO on the lower electrode by magnetron sputtering to form a rectifying functional layer.

[0079] 2.4 Transfer the bilayer graphene obtained by the chemical vapor deposition (CVD) process on the copper sheet to the rectifying functional layer to form a graphene layer by a peeling transfer process.

[0080] 2.5 Deposit 10nm ZrO on the graphene layer by magnetron sputtering 2 As a resistive dielectric layer.

[0081] 2.6 Deposit 70nm metal Ag on the resistive medium layer by electron beam evaporation process as the upper electrode.

[0082] 2.7 Deposit 10nm metal Au as a protective layer on the upper electrode by electron beam evaporation process.

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Abstract

The invention provides a bipolar resistive random access memory and a preparation method thereof. The bipolar resistive random access memory includes a substrate, a lower electrode which is composited with the upper surface of the substrate, a rectification function layer which is composited with the lower electrode, a graphene layer which is composited with the rectification function layer, a resistive dielectric layer which is composited with the graphene layer, and an upper electrode which is composited with the resistive dielectric layer, wherein the rectification function layer is formed by one or more of Al203, TiO2 and MgO. Compared with the prior art, the rectification function layer in the bipolar resistive random access memory can play a role in tunneling rectification and realize bidirectional rectification, and can also effectively restrain the crosstalk misreading phenomenon between adjacent units in a resistive random access memory array; and at the same time, because of existence of the graphene layer, the device performance is improved; the reset current is reduced; the response speed is improved; and the power consumption is reduced.

Description

technical field [0001] The invention belongs to the technical field of micro-nano electronic devices and memories, and in particular relates to a bipolar resistive memory and a preparation method thereof. Background technique [0002] With the continuous improvement of people's requirements for electronic equipment and the popularity of portable electronic equipment, the share of non-volatile memory in the entire memory market continues to expand. At present, FLASH storage technology is still the mainstream of the non-volatile memory market, accounting for more than 90% of the market share. However, with the continuous innovation of microelectronics and semiconductor technology, FLASH storage technology is facing a series of bottleneck problems, such as the impossibility of unlimited thinning of the floating gate with the development of technology, limited data retention time, excessive operating voltage, and high operating speed. Wait for a series of questions. The existe...

Claims

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Application Information

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IPC IPC(8): H01L45/00
CPCH10N70/8418H10N70/021
Inventor 刘琦赵晓龙刘明刘森龙世兵吕杭炳卢年端王艳张康玮
Owner 合肥中科微电子创新中心有限公司
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