Athermal arrayed waveguide grating

An arrayed waveguide and waveguide grating technology, applied in optical waveguides, light guides, optics, etc., can solve the problems of inability to mass-produce, incompatibility with CMOS processes, etc., and achieve the center wavelength temperature insensitivity, good process compatibility, and low The effect of maintenance costs

Active Publication Date: 2020-12-11
UNITED MICROELECTRONICS CENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although these two methods have good temperature stability control effects, for integrated optical processes such as SOI and SIN, these two methods are not compatible with traditional CMOS processes, and cannot be mass-produced quickly.

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Embodiment Construction

[0041] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0042] For example, when describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional view showing the device structure will not be partially enlarged according to the general scale, and the schematic diagram is only an example, which should not limit the protection scope of the present invention. In addition, the three-dimensional space dimensions of length, width and depth sho...

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Abstract

The invention provides an athermal arrayed waveguide grating. In arrayed waveguides, the adjacent arrayed waveguides have different waveguide lengths, the corresponding adjacent arrayed waveguides have different waveguide widths, and the waveguide widths of the arrayed waveguides are reduced along with the increase of the waveguide lengths of the arrayed waveguides. By changing the waveguide widths of the arrayed waveguides, athermalization of the arrayed waveguide grating is achieved. Good temperature stability can be maintained without external energy supply. The arrayed waveguide grating isa passive device, and the maintenance cost of the system can be greatly reduced. The design and the process are simple, a post-treatment process is not needed, the grating can adapt to large-scale mass production and commercialization, and the performance is stable; good process compatibility is achieved, and standard CMOS processing can be adopted; and multi-channel wavelength division multiplexing can be realized. According to the athermal arrayed waveguide grating, on the premise that the optical path difference of the adjacent arrayed waveguides is fixed on the whole, insensitivity of thecentral wavelength to temperature can be achieved.

Description

technical field [0001] The invention belongs to the field of optical communication and integrated optics, and relates to an athermal arrayed waveguide grating. Background technique [0002] With the development of 5G Internet, people's demand for data transmission is increasing. Optical communication has become the main method of network information transmission at present, but the demand for data transmission has grown very fast in recent years. In order to increase network transmission bandwidth and reduce network data transmission costs, the wavelength division multiplexing system has become the main solution to increase network bandwidth. [0003] At present, there are two main methods to realize wavelength division multiplexing: one is the wavelength division multiplexing device based on geometric optics lens system, and the other is the wavelength division multiplexing device based on integrated optics. Among them, although the wavelength division multiplexing device...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12
CPCG02B6/12026
Inventor 杨忠华李智慧何来胜梁宇鑫崔乃迪
Owner UNITED MICROELECTRONICS CENT CO LTD
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