Athermal arrayed waveguide grating
A technology of arrayed waveguide and waveguide grating, which is applied in the direction of optical waveguide light guide, optics, light guide, etc., can solve the problems of incapable of mass production and incompatibility with CMOS process, and realize the temperature insensitivity of central wavelength, good process compatibility, good The effect of temperature stability
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[0041] The embodiments of the present invention are described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.
[0042] When describing the embodiments of the present invention in detail, for the convenience of explanation, the cross-sectional views showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the protection scope of the present invention. In addition, the three-dimensional spatial dimensions of length, width and depth should be included i...
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