All-solid-state electric field reconfigurable magneto-optic device
A magneto-optical device, all-solid-state technology, applied in instruments, optics, nonlinear optics, etc., can solve the problems of difficult to achieve universality of magnetic regulation, incompatibility of semiconductor processes, non-volatile control, etc., and achieve poor process compatibility. , easy process compatibility, and the effect of improving device integration
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[0040] The present invention will be described in detail below in conjunction with embodiments and drawings.
[0041] Device structure: a heavily doped p-type Si single crystal substrate is selected as the bottom electrode and plays a role in supporting the growth of the film, the thickness of the Si slice is 0.5mm; the yttrium iron garnet (chemical formula is Y 3 Fe 5 O 12 , The film thickness is 56.0nm) the film is used as the seed layer of lattice matching to grow the cerium-doped yttrium iron garnet film (chemical formula is CeY 2 Fe 5 O 12 , Film thickness 49.6nm), CeY 2 Fe 5 O 12 Is a magnetic medium layer; titanium oxide (chemical formula is TiO x , 0 x . The thickness of the gold top electrode is 6.4nm, and its diameter is 650μm (the diameter of the top electrode is too large to cause device breakdown; the diameter of the top electrode is related to the defect density in the bottom film and the breakdown field strength. The bottom film has low defect density and breakdown f...
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