This invention discloses a high-
coercivity hard
magnetic oxide semiconductor thin film with
perpendicular magnetic anisotropy and its preparation method. The invention employs a multi-target alternating gradient film preparation process, using NiFeO4 and NiCo2O4 targets for alternating
sputtering to prepare NiCo2-xFexO4-NiCo2O4 gradient thin films. Experimental results show that the obtained films exhibit a
coercivity as high as 1T and good
conductivity, with an anomalous Hall resistivity reaching 52.5 μΩ·cm. This preparation method has the advantages of simplicity and low cost, providing new possibilities for the development of
magnetic storage devices. This method has significant application potential for realizing high-density, high-speed, and low-power
magnetic storage devices, contributing to the development and application of
magnetic storage technology.