The invention provides a high
Curie temperature hard
magnetic oxide semiconductor thin film and a preparation method thereof, and relates to the technical field of hard
magnetic oxide thin film materials, the high
Curie temperature hard
magnetic oxide semiconductor thin film comprises a supporting layer and a thin film layer, the supporting layer substrate is arranged on a
base station of a deposition cavity of a magnetron
sputtering system, and the thin film layer is prepared through a magnetron
sputtering method. Depositing a thin film on the supporting layer
single crystal substrate by adopting a thin film layer target material; according to the technical key points, the NiCo2O4 thin film is prepared by adopting a
radio frequency magnetron
sputtering preparation process and adopting a NiCo2O4 target material, the obtained thin film has the
Curie temperature of 380K or above, has excellent
conductivity, can overcome the limitation of a traditional
oxide hard magnetic material, has important application potential in the field of
magnetic storage, and can be applied to the field of
magnetic storage. The method can provide new possibility for research and development of high-density, high-speed and low-power-consumption
magnetic memory devices, and meanwhile, the method has the
advantage of relatively low cost of preparation materials, and is beneficial to realization of large-scale preparation and industrial production.