Evaporation equipment for flexible OLED and process of evaporation equipment

Abstract

The invention discloses evaporation equipment for a flexible OLED and a process of the evaporation equipment. The equipment comprises a vacuum evaporation chamber, a rotating shaft arranged at the top end of the vacuum evaporation chamber, and a substrate fixed on the rotating shaft, wherein the vacuum evaporation chamber is provided with a container for containing a coating material; the container is located below the substrate and electrically connected with a heating device; and the heating device is electrically connected with a power supply. The coating material is put into the controllable container for generating heat by using the heating device; heat energy is generated through starting a power supply heating container; the coating material is heated to form coating material vapor; the coating material vapor freely carries out linear motion and bumps against the surface of the substrate to be condensed, thereby forming a thin film; and the rotating shaft duly rotates, the substrate is uniformly coated and the workpiece can be kept uniform and does not easily form irregular arrangement to cause a defect. Through improvement of the technology, material waste is avoided, and cavity pollution is not caused by scattered organic molecules, thereby avoiding air molecule impurities of the thin film.

Description

technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a flexible OLED vapor deposition device and a process thereof. Background technique [0002] In recent years, with the advancement of science and technology, the popularization of personal computers, networks and information dissemination, displays have become an indispensable role in human-computer interaction, and the continuous improvement of display technology has driven the development of the display industry by leaps and bounds. Flat Panel Display (FPD for short) is one of the most important optoelectronic products at present. Its close correlation with daily life has made optoelectronic companies continuously strive to develop new flat panel displays for many years in order to pursue more perfect functions. The mainstream flat-panel display has developed from a cathode ray tube (CRT for short) display to a liquid crystal display (LCD for short). In the ranks of ne...

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Problems solved by technology

[0012] The layer of luminescent material is deposited on the ITO glass substrate by vacuum evaporation. It can be seen that the quality of the film affects the quality of the screen display.

The quality of the film has a great relationship with the evaporation process of OLED. Due to the defects in the existing evaporation process, not only the uniformity of the workpiece is not high; but also the irregular arrangement of the evaporation results in waste of materials and scattered organic matter. Molecules lead to chamber contamination, and the film will have air molecule impurities, etc.

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