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Mask plate and alignment detection system for evaporation of display panel

A mask and substrate pairing technology is applied in the field of alignment detection systems for mask and display panel evaporation, which can solve problems affecting process progress, wear, and alignment failures between masks and glass substrates, and achieves guaranteed The effect of alignment accuracy and improvement of progress

Inactive Publication Date: 2017-10-17
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The inventors of the present invention have found in the long-term research process that there are following shortcomings in the existing method for determining the positions of the glass substrate and the mask plate by means of an optical coupling device (Charge-Couple Device, CCD). Inevitably, there will be wear and tear in the process, which will lead to the inability to accurately determine the position of the mask in the CCD field of view, which will cause alignment failures between the mask and the glass substrate, thereby affecting the process progress

Method used

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  • Mask plate and alignment detection system for evaporation of display panel
  • Mask plate and alignment detection system for evaporation of display panel
  • Mask plate and alignment detection system for evaporation of display panel

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Embodiment Construction

[0013] see figure 1 , figure 1 It is a structural schematic diagram of an embodiment of the mask plate of the present invention, the mask plate 10 includes:

[0014] The substrate 100 is generally made of metal, such as stainless steel; its thickness can be designed according to the actual situation, and can be designed to be 0.03mm-1mm, such as 0.03mm, 0.08mm, 0.1mm, 0.5mm, 1mm, etc.; The reflectivity is 20%-40%, such as 20%, 30%, 40%, etc.;

[0015] The alignment mark 102 is arranged on one side of the substrate 100. Generally speaking, the middle part of the substrate 100 has a mask pattern (not shown in the figure). In order not to affect the normal use of the mask plate 10 in the manufacturing process, the alignment mark 102 is generally Set in the non-mask pattern area of ​​the substrate 100, such as near the peripheral edge of the substrate 100; in an application scenario, the mask plate 10 will be provided with alignment holes 104 in the non-mask pattern area when it...

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Abstract

The invention discloses a mask plate and an alignment detection system for the evaporation of a display panel. The mask plate comprises a substrate and an alignment mark arranged on one side of the substrate. The reflectivity of the alignment mark on the light is larger than the reflectivity of the substrate on the light. The reflectivity is in direct proportion to the reflection intensity. Based on the difference between the reflection intensities of the substrate and the alignment mark on the light, the alignment mark is recognized, and then the position of the mask plate is determined. Based on the above manner, the position of the mask plate can be judged.

Description

technical field [0001] The invention relates to the field of display panels, in particular to a mask plate and an alignment detection system for vapor deposition of a display panel. Background technique [0002] Organic Light Emitting Diode (OLED) has the characteristics of self-luminescence, thinness, and easy realization of flexible display. It is a new generation of display technology with good development prospects. [0003] At present, in the OLED panel manufacturing process, the evaporation of OLED materials generally adopts the physical vapor deposition method, that is, the organic material is placed in a crucible in a vacuum chamber and heated to sublimate or vaporize the organic material and form a film on the glass substrate; in order to make the organic material Material patterning requires the use of a mask during evaporation. Precise alignment is required between the mask plate and the glass substrate. [0004] The inventors of the present invention have found...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67H01L21/68H01L51/56C23C14/04C23C14/54
CPCH01L21/67259H01L21/67282H01L21/682C23C14/042C23C14/54H01L2221/67H10K71/164H10K71/166H10K71/00
Inventor 乔小平李金川
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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