A method of manufacturing a device with a large photostrictive effect

Abstract

The present invention proposes a kind of manufacturing method with large photostrictive effect device, is prepared according to the following manner: (1) select the single crystal with orientation as conductive substrate; (2) adopt pulsed laser deposition method (also can adopt Other methods, as long as epitaxial growth can be realized, such as molecular beam epitaxy, MBE) grow a piezoelectric thin film with a thickness of 400-600nm on the substrate; (3) adopt pulsed laser deposition (other methods can also be used, as long as the It is enough to achieve epitaxial growth, such as molecular beam epitaxy (MBE) to first grow a conductive film on a piezoelectric film, and then grow an insulating layer; grow a ferroelectric photovoltaic layer and electrodes with a thickness of 1000 Å on the insulating layer. In this application, by mastering the photo-driven multi-dimensional control method of ferroelectric multilayer film and clarifying its mechanism, it can be used to produce a photo-drive prototype device with large photo-induced deformation, in order to improve the anti-electromagnetic interference ability of the control system in the aircraft Lay the groundwork.

Description

technical field [0001] The invention relates to a main material of an optical driver, in particular to a manufacturing method of a device with a large photostrictive effect. Background technique [0002] Aircraft such as fighter jets play a pivotal role in modern warfare (especially air combat), and their high-altitude and long-range combat capabilities mainly depend on the control system. With the development of modern warfare in the direction of digitalization and informationization, the electromagnetic environment is becoming increasingly harsh, and electronic countermeasures are becoming more intense. It is imperative to improve the anti-electromagnetic interference capability of the control system in aircraft. The drive is a key component in the control system, mainly in the form of electric drive, magnetic drive and optical drive. Compared with electric and magnetic drives, optical drives are favored due to their advantages of no electromagnetic noise interference, no...

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Problems solved by technology

but, figure 1 (c) There are two disadvantages in the structure: first, the effective distance between the left and right electrodes (~1 mm) is short, and only a small part (about 1 / 10) of the length of the photovoltaic layer is used, which is not conducive to obtaining high photoluminescence. Second, because the piezoelectric layer is thin (only a few hundred nanometers), the photogenerated carriers in the photovoltaic layer are likely to be transported to the bottom electrode along the path 2 through the piezoelectric layer, and cannot be completely gathered on the left and right electrodes of the photovoltaic layer , which is also not conducive to obtaining high photogenerated voltage

However, the problem now is: how to achieve a strong positive coupling effect between the ferroelectric photovoltaic layer and the piezoelectric layer

(2) Due to the inverse piezoelectric effect of the piezoelectric layer, it will generate stress on the photovoltaic layer, thereby affecting the microstructure and photovoltaic performance of the photovoltaic layer

(3) Due to the different work functions, there are potential barriers at the interface of piezoelectric layer / electrode, photovoltaic layer / electrode, etc., which may reduce the photogenerated voltage generated by the photovoltaic layer and the electric field strength acting on the piezoelectric layer, thereby weakening the composite multilayer Photodeformation of membrane structures

[0009] In summary, using the photostrictive effect of ferroelectric materials can make optical drives that are resistant to electromagnetic interference and do not require external electric / magnetic fields (easy to realize remote control, conducive to miniaturization, integration, and weight reduction), but a single ferroelectric The photovoltaic effect and inverse piezoelectric effect of materials have contradictory requirements on the material scale

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