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A novel laser galvanometer lens, a laser galvanometer and a film plating method

A technology of laser galvanometer and lens, applied in the field of new type of laser galvanometer lens, can solve the problems such as the limitation of the wavelength of the indicator light, only one working wavelength, no versatility, etc., and achieves weight reduction, excellent thermal conductivity, and improved response speed. Effect

Pending Publication Date: 2017-11-07
ZHENJIANG JINHAICHUANG TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a new type of laser vibrating mirror lens, laser vibrating mirror and coating method to solve the technical problems in the prior art that there is only one working wavelength, the wavelength of the indicating light is limited, and there is no universality

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  • A novel laser galvanometer lens, a laser galvanometer and a film plating method
  • A novel laser galvanometer lens, a laser galvanometer and a film plating method

Examples

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Embodiment 1

[0033] to combine figure 1 As shown, the present embodiment provides a novel laser vibrating mirror lens, which includes: a base film layer 1, an intermediate film layer, and a high-reflection film layer 5 arranged in sequence from bottom to top; the intermediate film layer includes: The first connection film layer 2, the Al film 3 and the second connection film layer 4 are arranged in sequence on the top. Due to the design of the intermediate film layer, compared with the traditional process, it can meet the demand for indicating light in any wavelength band of 400-700nm, making the lens more versatile. Moreover, the design of the high-reflection film layer 5 simultaneously satisfies the requirement of high reflection (reflection rate above 99.5%) of the frequency-doubled wavelength.

[0034] In this embodiment, the first connecting film layer 2 and the second connecting film layer 4 are used as connecting layers, and their purpose is to strengthen the bonding strength betwe...

Embodiment 2

[0048] The second embodiment also provides a laser vibrating mirror, which includes the novel laser vibrating mirror lens described in the first embodiment. Wherein, the number of the new-type laser vibrating mirror mirrors is two, one of which is applied to the vibrating mirror X, and the other is applied to the vibrating mirror Y. Among them, the angle change of the galvanometer Y-axis film is 25° to 52.5°, and the angle change of the X-axis film is 32.5° to 57.5°.

[0049] Specifically, combining figure 1 As shown, the new laser vibrating mirror lens includes: a base film layer 1, an intermediate film layer and a high-reflection film layer 5 arranged in sequence from bottom to top; the intermediate film layer includes: a first connecting film arranged in sequence from bottom to top layer 2, Al film 3 and second connecting film layer 4. Due to the design of the intermediate film layer, compared with the traditional process, it can meet the demand for indicating light in an...

Embodiment 3

[0056] The third embodiment also provides a coating method for making the novel laser galvanometer lens described in the first embodiment, which includes:

[0057] Using vacuum evaporation coating technology (as a further technical solution, using vacuum evaporation coating technology, and using ion source for deposition assistance throughout the coating process), the first connection film is deposited on the base film layer 1 by electron beam evaporation Layer 2, on the first connection film layer 2, deposit an Al film 3 by resistance heating evaporation, on the Al film 3, deposit a second connection film layer 4 by electron beam evaporation, and on the second connection film layer 4 use The high reflection film layer 5 is deposited by electron beam evaporation.

[0058] The specific structure of the new laser galvanometer lens has been described in detail in the first embodiment above, and will not be repeated here.

[0059] For this embodiment, it can be produced by follow...

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Abstract

The invention relates to the technical field of laser galvanometers, and especially relates to a novel laser galvanometer lens, a laser galvanometer and a film plating method. The novel laser galvanometer lens comprises a basal film layer, an intermediate film layer and a high reflection film layer which are sequentially arranged from the bottom up, wherein the intermediate film layer comprises a first connecting film layer, an Al film and a second connecting film layer which are sequentially arranged from bottom to top. The novel laser galvanometer lens can meet the requirement of indicating light of any wavelength band of 400-700 nm so as to be more universal. The novel laser galvanometer lens can realize the laser wavelength at least satisfying the relationship of two multiples of the frequency, and can simultaneously satisfy more than 99.8% of the high reflection requirements of two wavelength bands of 532 nm and 1064 nm; the novel laser galvanometer lens has excellent thermal conductivity, a substantial increase in the unit area of the laser reflection power and a significantly decrease in the weight of the laser galvanometer lens, thereby enhancing the galvanometer response speed.

Description

technical field [0001] The invention relates to the technical field of laser vibrating mirrors, in particular to a novel laser vibrating mirror lens, a laser vibrating mirror and a coating method. Background technique [0002] At present, the galvanometer mirror is a scanning galvanometer in the process of laser scanning control application, through the swing of the X and Y mirrors, the laser can be positioned precisely in the working plane at high speed. The traditional laser galvanometer lens meets the high reflection of the working wavelength (the reflectivity is greater than 99.4%), and the specified indicator light reflection (the reflectivity is greater than 80%). Its shortcomings are mainly as follows: there is only one working wavelength; the indicator light wavelength is limited, It is not versatile; the thermal conductivity of the vibrating lens is poor, and the main substrate material is BK7 (optical glass); the weight of the vibrating lens is heavy, mainly due to...

Claims

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Application Information

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IPC IPC(8): G02B5/08G02B26/08
CPCG02B26/0816G02B5/0816
Inventor 郑璇李婷
Owner ZHENJIANG JINHAICHUANG TECH
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