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Mask plate carrying table and evaporation system

A technology of mask plate and metal mask plate, which is applied in the field of mask plate carrier and evaporation system, can solve problems such as thin thickness, and achieve the effect of improving product yield, pattern shape and outline clear, and gap reduction

Active Publication Date: 2017-11-17
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the problem in the prior art that when the organic material opening is evaporated to the substrate due to the deformation of the frame, the size of the evaporation pattern near the edge of the frame is larger than the normal pixel, and the thickness is thinner than the normal thickness, the embodiment of the present invention provides a mask On-Board Stages and Evaporation Systems

Method used

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  • Mask plate carrying table and evaporation system
  • Mask plate carrying table and evaporation system
  • Mask plate carrying table and evaporation system

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Embodiment Construction

[0037] In order to make the objectives, technical solutions and advantages of the present invention clearer, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0038] In order to facilitate the following description, the following is combined with the appendix Figure 1-Figure 3 The application scenarios of the mask stage provided by the embodiment of the present invention are described:

[0039] figure 1 is a schematic diagram of the structure of an evaporation system, figure 2 Yes figure 1 For a top view of the evaporation system provided, see figure 1 and figure 2 When performing organic vapor deposition, a mask stage 1 is set in the vapor deposition chamber, a frame 2 is set on the mask stage 1, and a metal mask 3 (mold) is set on the frame 2.

[0040]The outer contour of the mask stage 1 is columnar or table-shaped, and a first through hole 10 is provided in the middle of the mask stage ...

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Abstract

The invention discloses a mask plate carrying table and an evaporation system, belonging to the field of evaporation processes. The mask plate carrying table comprises a base and at least two correcting clamps arranged on the base at intervals, wherein the two correcting clamps are configured for tightly clamping a framework of a metal mask plate for evaporation on the base, and a first opening for allowing organic materials to pass is formed in the base. According to the embodiment of the invention, the mask plate carrying table comprises the base and the correcting clamps arranged on the base at intervals, and the first opening for allowing organic materials to pass is formed in the base; in an organic evaporation film coating process, the framework of the metal mask plate is clamped by the correcting clamps on the mask plate carrying table, so that the deformation of the framework is avoided, the gap between a base plate and the metal mask plate is reduced or even eliminated after the base plate is overlapped with the surface of the metal mask plate, the shapes and outlines of evaporated patterns are clear, the sizes of the evaporated patterns are normal, the poor mixed color effect is improved, and the product yield is increased.

Description

technical field [0001] The invention relates to the field of evaporation technology, in particular to a mask plate carrier and an evaporation system. Background technique [0002] The existing organic light-emitting diode (English Organic Light Emitting Diode, OLED) organic vapor deposition film technology is to use a high-precision metal mask as a mold to heat the organic material to volatilize it at high temperature. The openings of the membrane plate are evaporated onto the substrate. [0003] Specifically, the metal mask includes a frame and a metal mask provided with an opening. The metal mask is welded on the frame. During evaporation, the frame is set on a hollow stage, and the substrate to be evaporated is attached and placed. On the metal mask, a magnetic device is arranged on the side of the substrate to be evaporated that faces away from the metal mask, the metal mask is attracted to the substrate to be evaporated, the organic material is heated under the stage, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/12H10K99/00
CPCC23C14/042C23C14/12C23C14/24H10K71/40H10K71/166H10K71/00H10K71/164
Inventor 吕守华
Owner BOE TECH GRP CO LTD
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