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Silicon micro-resonant accelerometer online temperature compensation method based on resonant frequency

A technology of silicon micro-resonance and resonant frequency, applied in the direction of measuring acceleration, speed/acceleration/shock measurement, measuring devices, etc., can solve problems such as poor effect and hysteresis effect

Active Publication Date: 2017-11-24
SOUTHEAST UNIV
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Problems solved by technology

Due to the uncertainty of the temperature field distribution and the time delay of heat conduction, this compensation method does not work well and has a hysteresis effect

Method used

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  • Silicon micro-resonant accelerometer online temperature compensation method based on resonant frequency
  • Silicon micro-resonant accelerometer online temperature compensation method based on resonant frequency
  • Silicon micro-resonant accelerometer online temperature compensation method based on resonant frequency

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Experimental program
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Embodiment Construction

[0029] The present invention will be further described below in conjunction with accompanying drawing.

[0030] An online temperature compensation method for a silicon microresonant accelerometer based on the resonant frequency of the present invention, the accelerometer adopts a completely symmetrical differential structure to output the resonant signals of the two resonators, by measuring the resonant frequencies of the two resonators, and through the compensation algorithm Accelerometer resonant frequency output for real-time accurate compensation. The system uses Altera Cyclone IVE series FPGA as the core chip of the system, uses EPCS16 as the FPGA configuration chip, uses a 50MHz crystal oscillator, and uses RS485 serial port to communicate with the host computer. The schematic diagram of the temperature compensation system based on FPGA is as follows: figure 1 shown.

[0031] The two frequency signals to be measured in the system enter the frequency measurement system,...

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Abstract

The invention discloses a silicon micro-resonant accelerometer online temperature compensation method based on resonant frequency. A monotonic change relation curve of the square of two resonant beam resonant frequency and the resonant frequency difference is calibrated under the condition of zero acceleration, then the two resonant beam resonant frequency and the resonant frequency difference are measured under the condition of inputting acceleration, and the resonant frequency difference caused by the temperature is subtracted from the measured resonant frequency difference through combination of the previously obtained relation curve so that the temperature compensation work is completed. According to the silicon micro-resonant accelerometer temperature compensation method, the defect of large deviation of the compensation result caused by the uncertainty of temperature field distribution and thermal conduction delay of the conventional direct temperature compensation method can be overcome, and real-time and high-precision temperature compensation can be realized. The method is low in temperature compensation cost, and the whole scheme is realized based on the FPGA through the existing circuit devices without additional arrangement of sensors or introduction of other equipment.

Description

technical field [0001] The invention relates to the technical field of silicon micro-resonance accelerometers, in particular to an online temperature compensation method for silicon micro-resonance accelerometers based on resonance frequency. Background technique [0002] Silicon Resonant Accelerator (SRA) is a new type of micro-mechanical accelerometer based on MEMS technology developed in recent years. It has a wide range of applications in high-tech fields such as aviation, aerospace, and national defense. It consists of a proof mass, a resonator, an excitation unit and a detection unit. The acceleration squeezes or stretches the resonator through the proof mass to change its natural frequency. The excitation unit excites the resonator to resonate, and the detection unit detects The resonant frequency of the resonator is used to detect the change of the acceleration of the carrier by measuring the change of the frequency of the resonator. Because the elastic modulus of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/097
CPCG01P15/097G01P2015/0865G01P2015/0868
Inventor 李宏生张婷彭心悦黄丽斌
Owner SOUTHEAST UNIV
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