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Device for processing base plate

A technology for processing substrates and equipment, which is applied in the field of display device manufacturing, can solve problems such as substrate rework and waste, and achieve the effects of reducing downtime, avoiding rework or waste, and reducing production costs

Active Publication Date: 2017-12-01
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a device for processing substrates, which can prevent the shutdown of the entire processing system caused by the crystallization of the vibrator sensor during the processing of the substrate, and solve the problem of rework or over-etching of the substrate during processing. abandoned question

Method used

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  • Device for processing base plate
  • Device for processing base plate
  • Device for processing base plate

Examples

Experimental program
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Embodiment Construction

[0019] The present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings.

[0020] see image 3 , the first embodiment of the present invention is an equipment for processing a substrate, including a motor 104 , a conveyor belt 105 , an etching device 108 , a vibrator sensor 102 , a switch assembly 107 , a control module 103 and a cleaning device 109 . The motor 104 and the conveyor belt 105 jointly constitute a conveyor device for conveying the incoming substrate 101 . When the incoming substrate 101 enters the etching room, it becomes an etching substrate 106 . The etching device 108 is used to etch the etching substrate 106 . The vibrator sensor 102 is arranged on the path of the transmission device, and the switching state of the switch assembly 107 is controlled by the vibrator sensor 102 (for the specific working process, refer to Figure 6 and Figure 7 ). The control module 103 is electrically connected to t...

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PUM

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Abstract

The invention discloses a device for processing a base plate. The device comprises a transmission device, wherein the transmission device is used for transmitting the base plate; an etching device, wherein the etching device is used for etching the base plate; a vibrator sensor, wherein the vibrator sensor is arranged on a path of the transmission device; a switching assembly, wherein a switching state of the switching assembly is controlled by the vibrator sensor; a control module, wherein the control module is electrically connected with the switching assembly and is used for controlling start and stop of the transmission device; and a washing device, wherein the washing device is used for ejecting washing liquid to the vibrator sensor. According to the device for processing the base plate, a probability that a fault occurs in the vibrator sensor resulting from crystallization can be effectively reduced, the probability that the base plate is discarded and reworked due to excessive etching is reduced, and finally an effect of reducing costs is achieved.

Description

technical field [0001] The invention relates to the field of display device manufacturing process, in particular to a device for processing a substrate. Background technique [0002] In the field of display technology, flat panel display devices such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) have gradually replaced CRT displays. [0003] OLED has many advantages such as self-illumination, low driving voltage, high luminous efficiency, short response time, high definition and contrast, nearly 180° viewing angle, wide temperature range, flexible display and large-area full-color display, etc., and is recognized by the industry. It is the display device with the most development potential. OLED display devices generally include: a substrate, an anode disposed on the substrate, a hole injection layer disposed on the anode, a hole transport layer disposed on the hole injection layer, a light emitting layer disposed on the hole transport layer, a dev...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/677
CPCH01L21/67023H01L21/67207H01L21/677
Inventor 陈建锋
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD