Super-smooth plane polishing method based on magnetorheological foam

Abstract

The invention provides a super-smooth plane polishing method based on magnetorheological foam. Magnetorheological foam is used as polishing medium, and placed on a polishing disk, so that a flexible magnetic brush is formed under the effect of an applied magnetic field; workpiece and the magnetorheological foam are driven to move relatively by a polishing head and the polishing disk separately so that the workpiece is polished; a magnetorheological polishing solution and a foam matrix are coupled with each other under the effect of the magnetic field during polishing, and jointly used for supplying the required conditions for polishing, and a magnetic flux linkage is made up of ferromagnetic particles in the magnetorheological polishing solution under the effect of the magnetic field, and embedded into a micropore of the foam matrix; the effective shear stress of the flexible magnetic brush and the material removal rate are improved; due to the existence of the foam matrix, not only the variables for optimizing the polishing property are increased, but also the "accommodating-sinking" effect of traditional magnetorheological polishing is also reserved. According to the super-smooth plane polishing method provided by the invention, the magnetorheological polishing solution is saved, and the cost is reduced; and at the same time the polishing efficiency is improved, and the problems of high consumption of the magnetorheological polishing solution and low material removal rate in the traditional magnetorheological polishing are solved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision processing, in particular to an ultra-smooth plane polishing method based on magnetorheological foam, which is particularly suitable for ultra-smooth plane processing of microelectronic semiconductor wafers. Background technique [0002] With the development of optics and microelectronics and related technical fields, the surface quality requirements of the required materials are getting higher and higher. At this stage, the surface polishing of ultra-precision workpieces is mainly carried out by chemical mechanical polishing and magnetorheological polishing. However, after using chemical mechanical polishing, it will be difficult to clean the surface material of the workpiece, which will easily pollute the environment and cannot meet the surface cleanliness and environmental protection requirements of super precision workpieces. [0003] Magnetorheological polishing technology is a techno...

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Problems solved by technology

[0004] However, the use of magnetorheological polishing fluid to polish workpieces solves the above difficulties, but there are still problems such as easy precipitation of the polishing fluid, serious consumption of polishing fluid and abrasives, etc., which increases production costs, and the polishing efficiency and quality cannot meet production needs.

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