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Super-smooth plane polishing method based on magnetorheological foam

A magnetorheological polishing and ultra-smooth technology, which is applied in surface polishing machine tools, grinding/polishing equipment, machine tools suitable for grinding workpiece edges, etc., can solve the problem that polishing efficiency and quality cannot meet production needs, polishing liquid and Abrasive consumption, increased production costs and other issues, to avoid sedimentation and agglomeration, improve stability, and be beneficial to environmental protection

Active Publication Date: 2017-12-08
BEIJING JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, the use of magnetorheological polishing fluid to polish workpieces solves the above difficulties, but there are still problems such as easy precipitation of the polishing fluid, serious consumption of polishing fluid and abrasives, etc., which increases production costs, and the polishing efficiency and quality cannot meet production needs.

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Embodiment Construction

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or modules having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0024] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the word "comprising" used in the description of the present invention refers to the presence of said features, integers, steps, operations, elements and / or modules, but does not exclude the presence or addition of one or more other features, Integers, steps, operations, elements, modules, and / or groups thereof.

[0025] Those skilled in t...

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Abstract

The invention provides a super-smooth plane polishing method based on magnetorheological foam. Magnetorheological foam is used as polishing medium, and placed on a polishing disk, so that a flexible magnetic brush is formed under the effect of an applied magnetic field; workpiece and the magnetorheological foam are driven to move relatively by a polishing head and the polishing disk separately so that the workpiece is polished; a magnetorheological polishing solution and a foam matrix are coupled with each other under the effect of the magnetic field during polishing, and jointly used for supplying the required conditions for polishing, and a magnetic flux linkage is made up of ferromagnetic particles in the magnetorheological polishing solution under the effect of the magnetic field, and embedded into a micropore of the foam matrix; the effective shear stress of the flexible magnetic brush and the material removal rate are improved; due to the existence of the foam matrix, not only the variables for optimizing the polishing property are increased, but also the "accommodating-sinking" effect of traditional magnetorheological polishing is also reserved. According to the super-smooth plane polishing method provided by the invention, the magnetorheological polishing solution is saved, and the cost is reduced; and at the same time the polishing efficiency is improved, and the problems of high consumption of the magnetorheological polishing solution and low material removal rate in the traditional magnetorheological polishing are solved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision processing, in particular to an ultra-smooth plane polishing method based on magnetorheological foam, which is particularly suitable for ultra-smooth plane processing of microelectronic semiconductor wafers. Background technique [0002] With the development of optics and microelectronics and related technical fields, the surface quality requirements of the required materials are getting higher and higher. At this stage, the surface polishing of ultra-precision workpieces is mainly carried out by chemical mechanical polishing and magnetorheological polishing. However, after using chemical mechanical polishing, it will be difficult to clean the surface material of the workpiece, which will easily pollute the environment and cannot meet the surface cleanliness and environmental protection requirements of super precision workpieces. [0003] Magnetorheological polishing technology is a techno...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B1/00B24B31/10
CPCB24B1/005B24B31/10
Inventor 李建勇李保震朱朋哲曹建国聂蒙
Owner BEIJING JIAOTONG UNIV
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