Miniature silicon sapphire differential pressure sensor

A silicon sapphire, sensor technology, applied in pressure difference measurement between multiple valves, instruments, fluid pressure measurement, etc., can solve the failure of silicon piezoresistive pressure difference sensor, contamination of hydraulic oil, failure of servo system to operate normally, etc. problems, to achieve the effect of improving the product's anti-interference ability, convenient installation, and improving the ability to resist space electromagnetic radiation

Inactive Publication Date: 2017-12-22
BEIJING RES INST OF PRECISE MECHATRONICS CONTROLS +1
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  • Abstract
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AI Technical Summary

Problems solved by technology

Since the silicon piezoresistive differential pressure sensor is also a part of the hydraulic oil circuit seal in the servo system, the failure of the silicon oil seal will not only c

Method used

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  • Miniature silicon sapphire differential pressure sensor
  • Miniature silicon sapphire differential pressure sensor
  • Miniature silicon sapphire differential pressure sensor

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[0027] Reference figure 1 The structure diagram of the small silicon sapphire differential pressure sensor of the present invention is shown: the small silicon sapphire differential pressure sensor includes a housing 1, a circuit board 2, an adapter plate 3, a sensitive core 4, a sealing ring 5, a protective cover 6, and a stud 7. The silicon sapphire chip 8, the base 9, the base 9 is a part of the housing 1, in which a metal diaphragm is processed on the top of the sensitive core 4, and a silicon sapphire chip 8, a metal diaphragm and silicon are arranged on the metal diaphragm. The sapphire chip 8 is sintered at high temperature into one body and is connected to the circuit board 2 through the adapter plate 3 and the first wire. The sensitive core 4 is placed in the base 9 as a whole, and the upper section of the sensitive core 4 is a threaded section, which is connected to the base 9 by thread The lower section of the sensitive core 4 is a sealed section, which is connected t...

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Abstract

The invention relates to a miniature silicon sapphire differential pressure sensor. The miniature silicon sapphire differential pressure sensor is used for measuring pressure and differential pressure of hydraulic pressure or air pressure, and is characterized in that a metal diaphragm is processed at the top of a sensitive core body; a silicon sapphire chip is arranged on the metal diaphragm; the metal diaphragm and the silicon sapphire chip are integrated into one body through high temperature sintering, and are connected with a circuit board through pinboards and a first wire; the sensitive core body is overall arranged in a pedestal; the upper segment of the sensitive core body is a threaded segment, and is in threaded connection with the pedestal; and the lower segment of the sensitive core body is a sealing segment, and is in sealed connection with the pedestal. The invention relates to a miniature silicon sapphire differential pressure sensor which not only avoids the hidden trouble caused by leakage of silicone oil in a current oil sealing type silicon piezoresistive differential pressure sensor, but also has the advantages of miniaturization, high accuracy, high anti-interference capability, high reliability, and high environmental adaptability.

Description

technical field [0001] The invention relates to a small silicon sapphire differential pressure sensor, in particular to a small silicon sapphire differential pressure sensor suitable for its servo system in aerospace system technology. Background technique [0002] In aerospace system technology, the commonly used differential pressure sensor in its servo system is a silicon piezoresistive differential pressure sensor. This silicon piezoresistive differential pressure sensor has the functions of pressure measurement and dynamic pressure feedback, and needs to meet high temperature resistance and miniaturization. , High precision requirements. In the prior art, the packaging structure of the pressure sensitive core used in the silicon piezoresistive differential pressure sensor is an oil-sealed type, that is, the silicon oil used to transmit pressure inside the sensitive chip needs to be isolated from the measured medium through a thin film. Since the silicon piezoresistive ...

Claims

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Application Information

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IPC IPC(8): G01L13/06
CPCG01L13/06
Inventor 王臻李文璋杨明王伟余菲王彦奎
Owner BEIJING RES INST OF PRECISE MECHATRONICS CONTROLS
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