Miniature silicon sapphire differential pressure sensor

Abstract

The invention relates to a miniature silicon sapphire differential pressure sensor. The miniature silicon sapphire differential pressure sensor is used for measuring pressure and differential pressure of hydraulic pressure or air pressure, and is characterized in that a metal diaphragm is processed at the top of a sensitive core body; a silicon sapphire chip is arranged on the metal diaphragm; the metal diaphragm and the silicon sapphire chip are integrated into one body through high temperature sintering, and are connected with a circuit board through pinboards and a first wire; the sensitive core body is overall arranged in a pedestal; the upper segment of the sensitive core body is a threaded segment, and is in threaded connection with the pedestal; and the lower segment of the sensitive core body is a sealing segment, and is in sealed connection with the pedestal. The invention relates to a miniature silicon sapphire differential pressure sensor which not only avoids the hidden trouble caused by leakage of silicone oil in a current oil sealing type silicon piezoresistive differential pressure sensor, but also has the advantages of miniaturization, high accuracy, high anti-interference capability, high reliability, and high environmental adaptability.

Description

technical field [0001] The invention relates to a small silicon sapphire differential pressure sensor, in particular to a small silicon sapphire differential pressure sensor suitable for its servo system in aerospace system technology. Background technique [0002] In aerospace system technology, the commonly used differential pressure sensor in its servo system is a silicon piezoresistive differential pressure sensor. This silicon piezoresistive differential pressure sensor has the functions of pressure measurement and dynamic pressure feedback, and needs to meet high temperature resistance and miniaturization. , High precision requirements. In the prior art, the packaging structure of the pressure sensitive core used in the silicon piezoresistive differential pressure sensor is an oil-sealed type, that is, the silicon oil used to transmit pressure inside the sensitive chip needs to be isolated from the measured medium through a thin film. Since the silicon piezoresistive ...

AI Technical Summary

Problems solved by technology

Since the silicon piezoresistive differential pressure sensor is also a part of the hydraulic oil circuit seal in the servo system, the failure of the silicon oil seal will not only cause the failure of the silicon piezoresistive differential pressure sensor, but also pollute the hydraulic oil, which will seriously cause the servo system to fail to operate normally

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