Micromirror unit and preparation method, micromirror array and optical cross-connect module

Abstract

The invention relates to the field of communication technology, in particular to a micromirror unit, a preparation method, a micromirror array and an optical cross-connect module. The micromirror array includes a plurality of micromirror units distributed in an array; the optical cross-connect module includes the micromirror array. The micromirror unit includes a lens and a driving device, and the lens is provided with a supporting column toward the side of the driving device; the driving device includes a supporting frame, a rotating block fixedly connected with the supporting column, and is arranged on the rotating A plurality of piezoelectric driving arms around the block; one end of each piezoelectric driving arm is fixed to the support frame, and the other end is connected to the rotating block through an elastic member, and the piezoelectric driving arm includes An upper electrode, a lower electrode, and a piezoelectric material interposed between the upper electrode and the lower electrode. The micromirror unit is simple in structure, easy to manufacture, fast in switching speed and high in mirror duty ratio.

Description

Technical field [0001] The invention relates to the field of communication technology, in particular to a micromirror unit and a preparation method, a micromirror array and an optical cross-connect module. Background technique [0002] Modern communication technology, especially the high-speed mobile Internet, cloud computing and big data technology developed in recent years, provides convenience and convenience for people to access the Internet for shopping, watch high-definition videos and query data anytime and anywhere in their daily lives. Invigoration. These new Internet experiences will inevitably bring about massive communication data processing needs, and when the existing communication equipment faces such a huge information transmission and exchange business, blocking and delay phenomena occur from time to time, which invisibly weakens the user experience. . [0003] The optical cross-connect (OXC) module built by the micro-electro-mechanical system (Micro-Electro-Mech...

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Problems solved by technology

[0004] In the existing technology, such as Figure 1a as well as Figure 1b A micromirror unit 100 of an electrostatically driven micromirror array shown in the structure, the micromirror unit 100 includes a mirror 101, an electrostatic driving device 102 and an electrode part 103; the mirror 101 and the electrostatic driving device 102 are separated on different planes A , B, the support column of the lens 101 is bonded to the rotating block of the electrostatic driving device 102, and the electrostatic driving device 102 is hinged to the frame 104, so that the electrostatic driving device 102 can move under the electrostatic attraction of the electrode part 103, and The electrode part 103 is placed on the third plane C, and the support 105 of the frame 104 is bonded to the electrode part 103 provided with the electrode 1031. Therefore, the existing micromirror unit 100 adopts an electrostatic driving device 102 and has a three-layer structure. During the manufacturing process, two bonding connections are required, resulting in complex structure and difficult manufacturing of the micromirror unit 100

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