Vacuum leak detection automatic system with adjustable sensitivity

A sensitivity and leak detection technology, which is applied in the field of vacuum leak detection automation system, can solve the problems that the vacuum leak detection system cannot perform leak detection, etc., and achieve the effect of improving test data processing capacity, increasing utilization rate, improving convenience and accuracy

Active Publication Date: 2018-01-05
BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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Problems solved by technology

Due to the different leak rate requirements of different products, for products with a

Method used

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  • Vacuum leak detection automatic system with adjustable sensitivity

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Embodiment Construction

[0020] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0021] refer to figure 1 , the entire system of the present invention mainly includes a vacuum acquisition and measurement unit and a leak detection unit; the vacuum acquisition and measurement unit includes a vacuum chamber 7, a molecular pump 9, a screw pump 13, a vacuum gauge 6, pneumatic slide valves 8, 17, Controllable butterfly valve 10, solenoid valve and filter; the leak detection unit includes helium mass spectrometer leak detector 12, standard leak hole 3, inflation and deflation equipment 18 and computer control system 20, wherein, one end of the molecular pump 9 is passed through a pneumatic flashboard The valve one 18 is connected to the vacuum chamber 7, and the other end of the molecular pump 9 is communicated with the helium mass spectrometer leak detector 12 and the screw pump 13 through the solenoid valve one 11 and the controllable but...

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Abstract

The invention discloses a vacuum leak detection automatic system with adjustable sensitivity. The automatic system herein includes a vacuum acquisition and measurement unit and a leak detection unit.The vacuum acquisition and measurement unit includes a vacuum chamber, a molecular pump, a screw pump, a vacuum meter, a pneumatic gate valve, a controllable butterfly pump, an electromagnetic valve and a filter. The leak detection unit includes a helium mass spectrometer leak detector, a standard leak hole, an inflation and deflation device and a computer control system. The computer control system controls the molecular pump, the screw pump, the helium mass spectrometer leak detector and respective valve through a PLC program. According to the invention, by means of the computer control system, the system herein increases the easiness and accuracy in operating a test instrument, effectively increases the processing capability of test data, and saves time and cost spent in the test.

Description

technical field [0001] The technical field of vacuum leak detection of the present invention, specifically, the present invention relates to a vacuum leak detection automation system with adjustable sensitivity. Helium mass spectrometer leak detector with adjustable sensitivity. Background technique [0002] At present, the general vacuum leak detection system mainly includes a vacuum chamber, a high vacuum molecular pump, an auxiliary pump, a vacuum gauge, a stop valve, a standard leak hole, and a leak detector. First evacuate the vacuum chamber, and when the vacuum required for leak detection is reached, open the stop valve to connect the vacuum chamber to a leak detector that is working normally. After the leak detector is stable, record the background value of the system, then open the standard leak hole, and wait The indication value of the leak detector is stable, record the reaction value, close the standard leak and wait for the leak detector to return to the initia...

Claims

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Application Information

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IPC IPC(8): G01M3/20
Inventor 汪力孙立臣孟冬辉史纪军刘恩均孙立志张海峰赵建超齐飞飞李文斌
Owner BEIJING INST OF SPACECRAFT ENVIRONMENT ENG
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