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Method for nano-scale periodic poling of lithium niobate film

A technology of periodic polarization and lithium niobate, which is applied in nonlinear optics, pattern surface photolithography, optics, etc., can solve the problem that the polarization period cannot reach the nanometer level, and achieve simple and effective yield and preparation The effect of a simple, simplified polarization setup

Inactive Publication Date: 2018-01-09
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

[0003] Aiming at the defect that the polarization period of the prior art cannot reach the nanoscale, the present invention proposes a method for nanoscale periodic polarization of lithium niobate thin films, using nanoimprinting to make comb-shaped electrodes on lithium niobate single crystal thin films, and then Periodic electrical polarization by external electric field polarization method can prepare nanoscale periodically poled lithium niobate single crystal thin film

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  • Method for nano-scale periodic poling of lithium niobate film
  • Method for nano-scale periodic poling of lithium niobate film
  • Method for nano-scale periodic poling of lithium niobate film

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Embodiment Construction

[0021] In this embodiment, two kinds of lithium niobate single crystal thin film samples with different structures are adopted, specifically as figure 2 As shown in a, it is a lithium niobate substrate 11, a silicon dioxide layer 12, a conductive electrode 13, a lithium niobate single crystal thin film layer 14, and an adhesive layer 15; and figure 2 As shown in b, it is a lithium niobate substrate 11, a conductive electrode 13, a silicon dioxide layer 12, a lithium niobate single crystal thin film layer 14, and a glue layer 15. The two lithium niobate thin film structures adopted are basically the same. Except for the slight difference in the value of the applied polarization voltage during the implementation of the electric polarization, other steps and methods are the same.

[0022] The lithium niobate single crystal thin film is Z-cut and has a thickness of 300-700nm.

[0023] This embodiment includes the following steps:

[0024] Such as figure 2 As shown, first, a ...

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Abstract

The invention discloses a method for nano-scale periodic poling of a lithium niobate film. The method comprises the following steps: firstly executing the whirl coating on the surface of a lithium niobate monocrystal film sample, and executing the mould pressing to obtain a nano comb-like structure, plating a metal film layer on the nano comb-like structure as a top electrode, and executing the poling processing through the conductive electrode layer and the top electrode in the lithium niobate monocrystal film sample, and finally removing the whirl coating and the conductive electrode layer to obtain the periodic poling lithium niobate film. The preparation process of the method is convenient and is easily operated. A large area of a nano-scale periodic poling domain inversion structure can be obtained on the lithium niobate monocrystal film with hundreds of nanometers of the thickness through the method.

Description

technical field [0001] The invention relates to a technology in the fields of optoelectronics and optical communication, in particular to a method for realizing nanoscale periodic polarization of lithium niobate thin films by using nanoimprinting to make electrodes. Background technique [0002] Lithium niobate single crystal thin films also have important applications in integrated nonlinear optics and devices. At present, there are a variety of technologies that can realize ferroelectric domain inversion on lithium niobate single crystal thin films, such as electric field polarization method, femtosecond laser induction, AFM electric polarization and electron beam direct writing. Femtosecond laser induction, AFM electric polarization, and electron beam direct writing techniques can prepare micro- and nano-scale domain inversion structures. Complex polarization patterns can be fabricated by point-by-point scanning, but the speed of fabricating structures is limited. The p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/355G03F7/00
Inventor 丁婷婷郑远林陈险峰
Owner SHANGHAI JIAO TONG UNIV
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