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A micro planar motor device of an electromagnetic digital actuator array and its driving method

A technology of planar motors and driving methods, which is applied in the direction of electromechanical devices, electric components, and control/drive circuits, etc., can solve the problems of insufficient compact structure, inconvenient installation, complicated control, etc., and achieve Joule effect avoidance, simple structure, and responsive fast effect

Inactive Publication Date: 2019-05-17
XI'AN POLYTECHNIC UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, inherent defects such as high cost, complex control and not compact structure, inconvenient installation, high power consumption, etc. due to the analog actuators also exist in this type of planar motor device.

Method used

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  • A micro planar motor device of an electromagnetic digital actuator array and its driving method
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  • A micro planar motor device of an electromagnetic digital actuator array and its driving method

Examples

Experimental program
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Effect test

Embodiment 1

[0068] A miniature planar motor device of a microactuator array of an electromagnetic digital actuator, comprising a control board 1, the control board 1 is connected to a power amplifier 2 through a wire, the power amplifier 2 is connected to a circuit board 3 through a wire, and the circuit board 3, a glass thin plate 4 is arranged above the glass thin plate 4, an actuator array 5 is arranged above the glass thin plate 4, and a driven thin plate 6 is arranged above the actuator array 5. Such as figure 1 As shown, the actuator array 5 is composed of 9 actuator units 51, arranged in a 3x3 plane matrix, the distance between the actuator units is 1.5cm, the size of the units in the actuator array 5 is 1cmx1cm, and the unit displacement accuracy (Single-step extension x, y direction respectively) is 0.2mm.

[0069] The 5 units of the actuator array are driven to move the permanent magnet as a cube-shaped magnet with a length, width and height of 8mmx8mmx4mm, and the fixed perman...

Embodiment 2

[0075] A miniature planar motor device of a microactuator array of an electromagnetic digital actuator, which includes a control board 1, the control board 1 is connected to a power amplifier 2 through a wire, the power amplifier 2 is connected to a circuit board 3 through a wire, and the circuit A thin glass plate 4 is arranged above the plate 3 , an actuator array 5 is arranged above the glass thin plate 4 , and a driven thin plate 6 is arranged above the actuator array 5 . Such as image 3 As shown, the actuator array 5 is composed of 4 actuator units 51 arranged in a 2x2 plane matrix, the distance between the actuator units is 1cm, and the size of the units in the actuator array 5 is 1.5cmx1.5cm. The displacement accuracy (single-step extension in x and y directions respectively) is 0.5mm.

[0076] Actuator array 5 units are driven to move permanent magnets in the form of cubes with a length, width and height of 15mmx15mmx4mm. The fixed permanent magnets are cylindrical f...

Embodiment 3

[0082] A driving method of a miniature planar motor device of an electromagnetic digital actuator array, specifically implemented according to the following steps:

[0083] Step 1. If Figure 4 As shown, the actuator array 5 is determined to be arranged in a 5x5 plane matrix, and 25 actuator units are selected;

[0084] Step 2. If Figure 5 As shown, a current pulse is applied to all wires in the X direction of the circuit board 3, so that all actuator units are displaced, and move from one steady state position to another steady state position. Due to the relative displacement, the actuator unit and the setting There is a frictional force between the driven thin plates 6 above it, and under the action of the frictional force, the driven thin plate 6 realizes a single-step displacement output toward the driving direction of the actuator;

[0085]Step 3, Step 4. That is to send reverse current to the corresponding actuator unit 51 one by one to make the driven permanent magne...

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Abstract

The invention discloses an electromagnetic digital actuator array-based miniature planar motor device. The miniature planar motor device comprises a control board card, wherein the control board cardis connected with a power amplifier via a wire, the power amplifier is connected with a circuit board via a wire, a glass thin plate is arranged above the circuit board, the actuator array is arrangedabove the glass thin plate, and a driven thin plate is arranged above the actuator array. By the miniature planar motor device, the problems of high cost, control complexity, insufficient compact structure, high power consumption and inconvenience in installation of an existing electromagnetic digital actuator array-based miniature planar motor device are solved. The invention also discloses a driving method of the miniature planar motor device.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical planar motors, and relates to a micro-planar motor device of an electromagnetic digital actuator array, and also relates to a driving method of the micro-planar motor device. Background technique [0002] In today's MEMS, an actuator is a device that converts input energy into a mechanical output, such as mechanical motion, force, or a combination of both. In such systems, the most common actuators are those based on analog control, whose motion units can reach any position within the working stroke. This type of actuator generally has the following advantages, continuous control within the working range, high performance, high reliability, etc. To obtain these advantages, closed-loop control and corresponding feedback sensors are applied to this type of actuator. However, its control is also complicated due to the application of closed-loop control and corresponding feedback sensors to...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02K11/30H02K7/10
Inventor 呼延鹏飞毕宏彦窦浩
Owner XI'AN POLYTECHNIC UNIVERSITY