Nitrogen oxide gas sensor

Abstract

The invention discloses a nitrogen-oxygen sensor. The nitrogen-oxygen sensor comprises five substrates sequentially from top to bottom. The second substrate is provided with four cavities including anoriginal gas cavity, two oxygen pumping cavities and a measurement cavity in sequence, and the four cavities are partitioned through diffusion barrier layers. An electrode is arranged on each of thefirst substrate, upper and lower sides of the second and third cavities and the lower side of the fourth cavity. The electrodes on upper sides of the second and third cavities and the electrode on thefirst substrate form first and second oxygen pumping electrodes respectively. The electrode on the lower side of the second cavity is a counter electrode, and a measurement electrode is arranged in the fourth cavity. The third substrate is provided with a reference gas cavity connected with the atmosphere, a reference electrode of the measurement electrode is arranged between the third substrateand the fourth substrate, and a heating electrode is arranged on the lower side of the fourth substrate. The sensor is wide in concentration detection range, short in response time and simple in manufacturing process.

Description

technical field [0001] The invention belongs to the technical field of sensors, and more specifically relates to a gas sensor for detecting nitrogen oxides. Background technique [0002] With the development of social economy, the number of motor vehicles owned by our country has increased rapidly, and the emission of vehicle exhaust has become one of the important reasons for environmental pollution and frequent haze weather. The main source of nitrogen oxides in air pollutants is automobile exhaust. In order to control air pollution, the country has formulated increasingly strict regulations on vehicle exhaust emissions, requiring real-time monitoring and processing of the concentration of nitrogen oxides in vehicle exhaust. The nitrogen and oxygen sensor is the core of detecting the concentration of nitrogen oxides in vehicle exhaust. part. [0003] In the prior art, traditional nitrogen and oxygen sensors mostly adopt a sheet structure, which is formed by lamination an...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the defects of the prior art, the purpose of the patent of the present invention is to provide a nitrogen and oxygen sensor to solve the problems in the prior art due to the excessive use of ceramic substrates and complex structures.

Images