A monolithic integrated chaotic laser chip based on random grating feedback
A chaotic laser and monolithic integration technology, applied in the direction of lasers, laser components, semiconductor lasers, etc., can solve the problems of poor integration, low coupling accuracy, and insufficient stability, and achieve strong integration, small size, and stable output Effect
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[0033] see figure 1 As shown, the present invention provides a monolithic integrated chaotic laser chip structure based on random grating feedback, including:
[0034] a substrate 01;
[0035] Next limit layer 02,;
[0036] An active layer 03 fabricated on the lower confinement layer 02;
[0037] An upper confinement layer 04, which is fabricated on the active layer 03, works together with the lower confinement layer 02 to confine carriers and photons in the vertical direction;
[0038] A waveguide layer 05, which is strip-shaped, is longitudinally made in the middle of the upper confinement layer, and its function is mainly to limit the propagation of light laterally and guide the light;
[0039] a P + electrode layer 06, which is fabricated on the waveguide layer 05, the P + The electrode layer 06 is divided into two sections by an isolation trench 08, and the isolation trench 08 is formed by implanting He + The way of ions makes it a high resistance area, so as to re...
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