Two-degree-of-freedom inchworm type micro-nano positioning platform

A technology of micro-nano positioning and degrees of freedom, applied in workbenches, instruments, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., can solve the problem of low running speed, inconvenient adjustment of preload, and deformation of clamping mechanism Small problems, to achieve the effect of improving drive efficiency and load capacity, avoiding positive pressure instability, and reducing assembly errors

Active Publication Date: 2018-02-16
SHANDONG UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

The existing inchworm-type positioning platform has problems such as low running speed, small output load, and poor motion stability; in addition, due to the small deformation of the clamping mechanism, it is difficult to provide a continuous and stable clamping force during motion, and the pre-tightening force is inconvenient to adjust. Large or too small preload will affect the positioning effect of the inchworm positioning platform

Method used

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  • Two-degree-of-freedom inchworm type micro-nano positioning platform
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  • Two-degree-of-freedom inchworm type micro-nano positioning platform

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Embodiment Construction

[0045] It should be pointed out that the following detailed description is exemplary and intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0046] It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

[0047] Below in conjunction with embodiment and accompanying drawing thereof, technical scheme of the present in...

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Abstract

The invention discloses a two-degree-of-freedom inchworm type micro-nano positioning platform. The two-degree-of-freedom inchworm type micro-nano positioning platform comprises an X-direction inchwormdriver, a Y-direction inchworm driver and a displacement detection device, wherein each inchworm driver is composed of a base, two flexible clamping units, a flexible driving unit and three piezoelectric stack ceramics. The microgap between clamping mechanisms can be subjected to fine adjustment through the bases. The displacement detection device is composed of two movable mirror surfaces and two fixed mirror surfaces, wherein the fixed mirror surfaces are mounted on the bases, the movable mirror sufaces are mounted on the X-direction inchworm driver and the Y-direction inchworm driver correspondingly, and steps used for positioning the mirror surfaces are machined on the aspect of installation. The micro-nano positioning platform can be driven to perform double-direction movement through extending and retracting of the clamping mechanisms and a driving mechanism. The inchworm type positioning platform can achieve two-degree-of-freedom, high-accuracy, high-resolution and large-strokemovement and can be used for scanning probe microscopes, optical precise measurement, nano-manufacturing and assembling, micro-nano operation and the like.

Description

technical field [0001] The invention relates to a micro-nano positioning platform based on the principle of inchworm drive, in particular to a two-degree-of-freedom inchworm-type micro-nano positioning platform, which can be used for ultra-precision machining, precision optical trajectory tracking detection, bioengineering and micro-nano positioning platform. Electromechanical systems and other fields. Background technique [0002] Micro-nano technology is a high-tech technology focused on the development of countries in the world in the 21st century. Among them, the ultra-precise micro-nano positioning platform with nano-level positioning accuracy is the core power device of micro-nano technology. Ultra-precision micro-nano positioning platform has a wide range of applications in aerospace, precision optical engineering, bioengineering and modern medicine, ultra-precision machining and measurement, micro-machining and assembly and other fields. The rapid development of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00H02N2/04B25H1/00
CPCB25H1/00G12B5/00H02N2/04
Inventor 闫鹏汪越李建明
Owner SHANDONG UNIV
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