SiC power device-based full bridge LLC resonance type plasma power supply
A technology of plasma and power devices, which is applied in the direction of output power conversion device, conversion of AC power input to DC power output, conversion of DC power input to DC power output, etc., to achieve low dynamic loss, high reliability, and improved efficiency Effect
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[0027] Example
[0028] Such as Figure 1 to Figure 4 As shown, the full-bridge LLC resonant plasma power supply based on SiC power devices in this embodiment includes a main circuit and a control circuit; the main circuit includes a rectifier filter module, a high-frequency full-bridge inverter module, a high-frequency transformer module, and a fast rectifier connected in sequence. Filter module: The rectifier filter module is connected to the three-phase AC input power supply, and the fast rectifier filter module is connected to the load.
[0029] The high-frequency full-bridge inverter module includes SiC power switch Q101, SiC power switch Q102, SiC power switch Q103, SiC power switch Q104, inductor L102, inductor L103 and capacitor C107; SiC power switch Q101 and SiC power switch Q103 Connected in series and connected in parallel to the rectifier and filter module; SiC power switch tube Q102 and SiC power switch tube Q104 are connected in series and then connected in parallel ...
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