Mask device

Abstract

The invention relates to a mask device comprising a mask plate and a shielding member. The mask plate is evenly provided with multiple through holes. The shielding member is connected with the mast plate in an abutting way. The shielding member is provided with a port of which the shape is irregular. The port is aligned with a part of through holes on the mask plate and the port is communicated with all the aligned through holes. The shielding member is arranged on the rest part of through holes on the mask plate in a shielding way. The mask plate is evenly provided with the through holes so that all parts of the mask plate are enabled to have the same mechanical property, the overall deformation of the mask plate is enabled to be consistent and wrinkling can be avoided. Besides, the irregularly shaped port of the shielding member is adaptive to the special-shaped AA region of the display screen, the organic material can be vapor-deposited on the substrate through the port and the through holes aligned with the port in turn and the through holes shielded by the shielding member can effectively shield the organic material so that the special-shaped AA region of irregular shape can be formed on the substrate and the vapor deposition effect of the display screen equipped with the special-shaped display region is enabled to be better.

Description

technical field [0001] The invention relates to the technical field of organic light-emitting display manufacturing, in particular to a mask device. Background technique [0002] In the AMOLED (Active-matrix organic light emitting diode, active matrix organic light emitting diode) production process, the process that most affects the yield is the evaporation process. The basic process of the evaporation process is to heat the organic material to evaporate the organic material. And the through hole etched through the high-precision fine mask plate is evaporated on the glass substrate to form a light-emitting unit. In the evaporation process, the evaporated organic material is evaporated onto the substrate through the through hole in the active area of ​​the mask to form the AA (Active Area) area of ​​the display screen, also called the display area. [0003] High-precision fine mask plates are usually produced by etching methods. The thickness of the high-precision fine mas...

AI Technical Summary

Problems solved by technology

In this way, it is necessary to use long strips of shielding strips in the Dummy to prevent organic materials from being deposited on the substrate other than the AA area through the etching holes in the Dummy area, which will eventually lead to product failure.

[0006] However, for the special-shaped AA area (that is, the AA area is an unconventional shape), the etching holes in the Dummy area cannot be shielded by long strips of shielding strips, which leads to the deposition of materials on the substrate through the Dummy, and finally leads to the display of evaporation. bad screen

For the special-shaped AA area, if the etching hole area corresponding to the effective display area of ​​the high-precision mask is made into a corresponding special-shaped area, the elastic strain of the high-precision mask will be inconsistent when the force is applied, and the overall deformation of the mask will be caused. Inconsistent, wrinkled, affecting product yield

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