Board-level integrated magnetic induction sensor based on surface acoustic wave resonator

Abstract

The invention discloses a board-level integrated magnetic induction sensor based on a surface acoustic wave resonator, which comprises a high-frequency substrate (7), a surface acoustic wave resonatorchip, a planar magnetic induction coil (71) and multiple metal membrane wires, wherein the surface acoustic wave resonator chip is attached to a chip bonding area at one side of the top surface of the high-frequency substrate (7); the planar magnetic induction coil (71) is etched at the other side of the top surface of the high-frequency substrate (7); the multiple metal membrane wires are etchedon the bottom surface of the high-frequency substrate (7); and the inner end and the outer end of the planar magnetic induction coil (71) are respectively connected with a surface acoustic wave resonator voltage regulation electrode layer and a DC grounding electrode on the high-frequency substrate through the metal membrane wires, a metal through hole, a DC electrode and a bonding lead (9). According to the board-level integrated magnetic induction sensor based on the surface acoustic wave resonator, digital acquisition and processing of the magnetic induction signals can be realized conveniently, and the adjustment is flexible and convenient.

Description

technical field [0001] The invention belongs to the technical field of magnetic induction sensors, in particular to a board-level integrated magnetic induction sensor based on a surface acoustic wave resonator. Background technique [0002] Magnetic sensors are used to sense magnetic field strength and then detect physical parameters such as current, position, and direction. Magnetic induction sensors have been widely used in various fields of social development and human life, such as industrial automation, aerospace technology, military engineering, environmental monitoring, security, and medical treatment. diagnosis etc. [0003] Magnetic induction sensors in the prior art include reed switches, current sensing transformers, open-loop and closed-loop Hall elements, and fluxgate sensors (patent 201480016300.7; patent 201510273729.0). The disadvantages of traditional magnetic sensors are discrete structures and large volumes. , the dynamic range is small, and the measureme...

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Problems solved by technology

[0004] However, the output physical quantities of the above-mentioned various magnetic induction sensors are mostly analog quantities such as current, voltage, and magnetoresistance, which are not convenient for digital acquisition and processing of output signals.

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