Scanning probe microscope

Abstract

For each single picture, an imaging control unit (11) controls a video camera (8) so as to capture an image while switching between a first imaging condition suitable for capturing an image of a laserlight spot and a second imaging condition suitable for capturing an image of a cantilever. A picture synthesis unit (15) creates a picture in which a laser light spot image and a cantilever image clearly appear in each of two consecutive pictures, and displays the picture in a display unit (9). A laser light center position detection unit (13), a cantilever tip position detection unit (14), and aposition adjustment amount computation unit (16) calculate a position adjustment amount for adjusting an optical axis from the laser light center position and the cantilever tip position obtained byimage processing from each of the two consecutive pictures, and the calculated numerical value is also displayed in the display unit (9). An operator operates an operating unit (7) while viewing the pictures and the adjustment amount, and executes an optical axis adjustment. Optical axis adjustment can thereby be easily and reliably performed on the basis of a real observation picture not adequately viewable by normal imaging.

Description

technical field [0001] The present invention relates to a scanning probe microscope, and more specifically, to a scanning probe microscope including a displacement detection unit that optically detects the mechanical displacement of a cantilever on which a probe is placed. Background technique [0002] As a device for observing the surface of metals, semiconductors, ceramics, synthetic resins, etc. or measuring surface roughness, there is a scanning probe microscope (SPM: Scanning Probe) represented by an atomic force microscope (AFM: Atomic Force Microscope). Microscope), the atomic force microscope (AFM: Atomic Force Microscope) measures the atomic force acting between the probe (probe) and the surface of the sample. Although various measurement modes can be used in the atomic force microscope, recently, a method called non-contact mode or dynamic mode is used more frequently. The interaction between the probe and the sample surface is converted into a change in the ampli...

AI Technical Summary

Problems solved by technology

Of course, the optical axis can be adjusted by such a method, but it may be difficult for an operator accustomed to the conventional optical axis adjustment work to intuitively understand the adjustment of the position using the marker.

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