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Grinding liquid stirring device

A stirring device and a technology for grinding liquid, which are applied in the field of semiconductor integrated circuit manufacturing, and can solve the problems of affecting the chemical stability of grinding liquid, low stirring efficiency of stirring blades, and rising temperature of grinding liquid, etc.

Inactive Publication Date: 2018-03-30
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Such a stirring device will cause the following problems: the stirring efficiency of a single set of stirring blades is low, and the only way to increase the stirring efficiency is to increase the stirring speed, but the stirring speed cannot be increased indefinitely. Agglomeration during flow, excessive stirring speed will also cause the temperature of the grinding liquid to rise, affecting the chemical stability of the grinding liquid
Single stirring liquid level, the stirring control area is limited, when the liquid level is close to the stirring liquid level, in order to prevent the grinding liquid from splashing, the stirring must be stopped, and the stirring efficiency will be reduced

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Such as figure 2 As shown, the grinding liquid stirring device of the present invention includes a stirring barrel 60 , two sets of stirring blades 20 , two stirring shafts 10 , two stirring shaft drive assemblies, a stirring control unit 80 and a liquid level sensor 90 . The stirring blades 20 are arranged in the mixing bucket 60; each stirring shaft 10 is fixedly connected with the stirring blades respectively, and the stirring shafts are concentric; two stirring shaft drive assemblies respectively drive the two stirring shafts to rotate; The control unit 80 controls the start and stop of the stirring shaft drive assembly according to preset conditions. The liquid level sensor 90 is used to sense the height of the liquid and transmit the signal to the stirring control unit 80 . The stirring control unit 80 controls the start and stop of the stirring shaft driving assembly according to the relationship between the liquid level of the grinding liquid in the stirring b...

Embodiment 2

[0035] Such as image 3 Shown is another embodiment of the grinding liquid stirring device of the present invention. On the basis of Embodiment 1, a grinding liquid circulation device is added, which includes a grinding liquid circulation pump 40 and a circulation pipe 50 inserted in the grinding liquid, and the grinding liquid stirring device always works to maintain the self-circulation of the grinding liquid.

Embodiment 3

[0037] Such as Figure 5 Shown is another embodiment of the grinding liquid stirring device of the present invention. It includes a stirring bucket 60, three sets of stirring blades 20, three stirring shafts 10, three stirring shaft drive assemblies, a stirring control unit 80 and a liquid level sensor 90. The stirring blades 20 are arranged in the mixing bucket 60; each stirring shaft 10 is fixedly connected with the stirring blades respectively, and the stirring shafts are concentric; the three stirring shaft drive assemblies respectively drive the three stirring shafts to rotate; the stirring control A unit 80 controls the start and stop of the stirring shaft driving assembly according to preset conditions. The liquid level sensor 90 is used to sense the height of the liquid and transmit the signal to the stirring control unit 80 . The stirring control unit 80 controls the start and stop of the stirring shaft driving assembly according to the relationship between the liqu...

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PUM

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Abstract

The invention discloses a grinding liquid stirring device. The device comprises a stirring barrel, X groups of stirring blades, X stirring shafts, a stirring shaft driving assembly and a stirring control unit; the stirring blades are arranged in the stirring barrel, wherein X is an integer greater than or equal to two; the stirring shafts are fixedly connected with the stirring blades respectivelyand are concentric; the stirring shaft driving assembly drives the stirring shafts to rotate; the stirring control unit controls the stirring shaft driving assembly to start to work or stop working according to preset conditions. By means of the grinding liquid stirring device, the stirring efficiency can be improved under the condition of not increasing the stirring rotation speed, and thereforethe device has the advantages that not only can the chemical properties of grinding liquid not be affected, but also the grinding liquid can be prevented from depositing.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to a grinding liquid stirring device. Background technique [0002] Chemical mechanical polishing (CMP) equipment plays an extremely important role in the production of integrated circuits. The main components of CMP equipment include grinding head (Head), retaining ring (Retaining Ring), grinding table (Platen), grinding pad (Pad), grinding liquid supply Device (Slurry Supplier), trimming disk (Disk) and cleaning device, etc. The main function of the grinding liquid supply device is to pre-stir the grinding liquid to prevent the precipitation of the grinding particles in the grinding liquid, ensure the uniform distribution of each component in the grinding liquid, and dilute the grinding liquid according to the actual needs of the grinding machine. Then send the grinding liquid to the grinding machine. After the grinding liquid is left standing for a ...

Claims

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Application Information

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IPC IPC(8): B01F7/16B01F15/00B01F5/10B24B57/02
CPCB24B57/02B01F25/52B01F27/1125B01F27/212B01F27/213B01F27/232B01F27/191B01F27/80B01F35/2112B01F2101/27
Inventor 李虎赵正元张守龙
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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