A Cylindrical Shell Coriolis Vibrating Gyroscope with Electrostatic Excitation and Detection
An electrostatic excitation and vibrating gyroscope technology, applied in the field of inertial devices, can solve problems such as high cost, complex gyroscope structure, and high assembly precision requirements, and achieve the effects of improving processing accuracy, reducing process difficulty, and high gyroscope accuracy
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specific Embodiment 1
[0035]The cylindrical shell Coriolis vibrating gyroscope mainly includes a cylindrical shell resonator 1, an electrostatic excitation and detection integrated upper cover 2, a gyro buffer circuit board 6, and a gyro sealing shell 5. The cylindrical shell resonator 1 adopts a cylindrical shell axisymmetric structure and is made of high-Q material. The cylindrical shell resonator 1 includes a fully fixed cylindrical shell resonator 1-1 and a cylindrical shell resonator base 1-2; the bottom end of the fully fixed cylindrical shell resonator 1-1 is connected to the cylindrical shell resonator base 1-2, and the bottom The end is completely fixed, and the outer side of the fully fixed cylindrical shell resonator 1-1 is provided with a gyro support outer wall 8; the excitation and signal detection of the gyro are realized by means of electrostatic drive and electrostatic detection, and the integrated upper cover 2 of electrostatic excitation and detection includes the excitation The ...
specific Embodiment 2
[0042] The cylindrical shell Coriolis vibrating gyro of the present invention mainly includes a cylindrical shell resonator 1 , an electrostatic excitation and detection integrated upper cover 2 , a gyro buffer circuit board 6 , and a gyro sealing shell 5 . The cylindrical shell resonator 1 adopts the axisymmetric structure of the cylindrical shell and is made of high-Q material. The bottom end of the cylindrical shell resonator 1 is connected to the base 1-2 of the cylindrical shell resonator, and the bottom end is completely fixed. The outer side of the resonator on the substrate is There is a gyro support outer wall 8; the excitation and signal detection of the gyro are realized by means of electrostatic drive and electrostatic detection. The electrostatic excitation and detection integrated upper cover 2 includes the excitation electrode plate group 3, the detection electrode plate group 4 and the upper cover plate 9 three Part, the excitation electrode plate group 3 and th...
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