MEMS thermal acoustic particle sensor

Abstract

The invention discloses an MEMS thermal acoustic particle sensor and relates to the field of microelectronic machining, and in particular relates to a design method for the MEMS thermal acoustic particle sensor. Currently, based on a principle of a two-wire flowmeter, conventional MEMS thermal acoustic particle sensors have large self-noise and poor high-frequency characteristics. To solve this problem, the present invention provides a MEMS three-wire thermal acoustic particle sensor structure that can be applied to sound source positioning. The sensor has a three-layer cantilever structure which is formed by bonding upper and lower polar plates and consists of two right and left measuring units having orthogonal planes. Two temperature sensing resistance cantilever beams are arranged on each of two upper and lower layers of each measuring unit, and a heating resistance cantilever beam from an upper plate or a lower plate is arranged on a middle layer. Four cantilever beams on the upper and lower layer form a rectangle, and the cantilever beam on the middle layer is located at the center of the rectangle. Processing steps include a step of making three cantilever beams on each of two front and back surfaces of the upper and lower polar plates of each measuring unit, a step of removing excessive cantilever beams in the upper and lower polar plates, and a step of bonding the upper and lower polar plates together.

Description

technical field [0001] The invention relates to the field of microelectronic machining, in particular to a design method of a MEMS thermal acoustic particle sensor. Background technique [0002] Acoustic vector sensor technology is one of the most promising research directions in the field of underwater acoustic technology in the 21st century in my country, and it is also widely used in industry and life. In daily life, vector sensors can be used for sound positioning, such as vehicle fault detection, life detection, etc.; in the field of underwater acoustics, they can be used for underwater acoustic signal detection, underwater investigation, etc. Acoustic vector includes two parts: acoustic particle velocity and sound pressure. Among them, the detection method of sound pressure is relatively mature, but the detection of acoustic particle velocity is a major difficulty. [0003] Traditional acoustic particle sensors are not based on microelectronics technology, but use ind...

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Problems solved by technology

[0005] The self-noise is large, because the two suspension beams of a pair of wire groups are heated, the thermal noise generated is larger than that of a single suspension beam;

[0006] The high-frequency characteristics are poor, and the two suspension beams of a pair of wire groups both absorb and release heat. Due to the heat capacity of the suspension beam itself, its cut-off frequency is low

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