Distribution analysis image acquisition and data processing system for X-ray fluorescence spectrometer

Abstract

The invention relates to a key functional part of a wave spectrum-energy spectrum combined type X-ray fluorescence spectrometer, in particular to a distribution analysis image acquisition and data processing system for a wave spectrum and energy spectrum combined type X-ray fluorescence spectrometer. According to the system, a surface area of a to-be-tested sample is precisely positioned through an imaging module; the sample is driven to move to an appointed position for energy spectrum full-element distribution analysis and wave spectrum unit element distribution analysis; energy spectrum data and wave spectrum data are combined through a data quantitative and qualitative analysis module, then distribution analysis information of element contents of the to-be-tested area on the surface ofthe sample is obtained, and two-dimensional and three-dimensional data models are established and displayed through a data image processing module. By adopting the system, with the combination of rapid scanning of energy spectrums and fine scanning on key areas through wave spectrums, rapid high-precision positioning analysis on a sample is carried out, the analysis speed is increased, and the analysis sensitivity is improved; with the combination of common analysis and element distribution analysis, and with the combination of wave spectrums and energy spectrums, the application field of WEDXRF spectrographs is widened.

Description

technical field [0001] The present invention relates to the key functional components of a composite X-ray fluorescence spectrometer (hereinafter referred to as WEDXRF spectrometer), and in particular to a distribution analysis image acquisition and data processing suitable for a composite X-ray fluorescence spectrometer system. Background technique [0002] With the development of modern science and technology, various high-strength and high-toughness new metal materials are increasingly purified and homogenized, but conventional spectrometers are mainly based on overall sample analysis, and ICP spectrometers / mass spectrometers for solution sampling can only obtain samples. Part of the average chemical composition data, and the relationship between the structure and performance of the material and the element composition distribution information that can characterize the "material uniformity" is more direct. Therefore, it is necessary to develop effective element distributi...

AI Technical Summary

Problems solved by technology

[0004] The X-ray fluorescence spectrometer with distribution analysis function in the prior art adopts the energy spectrum scanning mode alone or the spectrum scanning mode alone for the element distribution analysis of block samples, and the energy spectrum distribution analysis scanning mode alone is fast, but The sensitivity is low, and the detection ability of light elements cannot meet the needs; the scanning mode of spectral distribution analysis alone is slow, but the sensitivity is high, and accurate information of light elements can be obtained

But the compound type X-ray fluorescence spectrometer of wave spectrum energy spectrum has not been reported so far

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