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Method for preparing oxide ceramic target material green body

A technology for oxide ceramics and target blanks, which is applied to die-casting molds, molds, etc., can solve the problems of difficult production, complex structure, and difficult operation, and achieve the effects of good blank formability, simple process operation, and simple mold.

Pending Publication Date: 2018-05-18
ZHENGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the commonly used method of preparing oxide targets is to use molding and isostatic pressing to produce green bodies with uniform density, but the molds used are complicated and difficult to make, so it is not easy to prepare large-size high-density target green bodies.
[0004] In the prior art (such as CN205816478U, CN105965746A), there are devices and molds for forming cylindrical targets, but their structures are complex and difficult to operate

Method used

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  • Method for preparing oxide ceramic target material green body
  • Method for preparing oxide ceramic target material green body
  • Method for preparing oxide ceramic target material green body

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Example 1 A high-density ITO target was prepared using the method disclosed in the present invention.

[0053] The first step: prepare high volume solid content ITO slurry. Weigh the oxide powder In 2 o 3 450g and SnO 2 50g, add 7.5g of polyacrylic acid as dispersant, 2.5g of gum arabic as adhesive, 6g of high-molecular organic acrylamide and 75g of high-purity water to form a premix.

[0054] The second step: vacuum ball milling. After adding all the raw materials into the ball milling tank, vacuumize the ball milling tank until the vacuum degree reaches 10Pa, and then conduct long-term ball milling for 48 hours, and finally prepare an ITO slurry with a volume solid content of up to 48% and a viscosity as low as 100 centimeters Poor slurry.

[0055] In the third step, the obtained slurry is poured into a cylindrical plaster mold to form a green ITO oxide ceramic target.

[0056] In the fourth step, the green body obtained in the third step above is moved into a...

Embodiment 2

[0059] Example 2 A high-density IGZO target was prepared using the method disclosed in the present invention.

[0060] The first step: prepare high volume solid content IGZO slurry. Weigh 221.1g In respectively 2 o 3 Oxide powder, 149.25gGa 2 o 3 Oxide powder and 129.65g of ZnO oxide powder; 8.5g of dispersant polyacrylic acid, 1.5g of adhesive gum arabic, 5g of polymer organic acrylamide and 80g of high-purity water constitute the premix.

[0061] The second step: vacuum ball milling. After adding all the raw materials into the ball milling tank, vacuumize the ball milling tank until the vacuum degree reaches 9Pa, and then conduct long-term ball milling for 72 hours, and finally prepare an IGZO slurry with a volume solid content of up to 50% and a viscosity as low as 100 centimeters Poor slurry.

[0062] In the third step, the ball-milled slurry is poured into a cylindrical plaster mold to form a green IGZO oxide ceramic target.

[0063] In the fourth step, the green b...

Embodiment 3

[0066] Example 3 A high-density AZO target was prepared using the method disclosed in the present invention.

[0067] The first step: prepare AZO slurry with high volume solid content. Weigh the oxide powder ZnO mass as 490g and Al respectively 2 o 3 The mass of alumina is 10g; add 5.5g of polyacrylic acid as a dispersant, 3.5g of gum arabic as an adhesive, 4g of acrylamide as an organic polymer and 95g of high-purity water to form a premix.

[0068] The second step: vacuum ball milling. After adding all the raw materials into the ball milling tank, vacuumize the ball milling tank until the vacuum degree reaches 9.5Pa, and then conduct long-term ball milling for 60 hours, and finally prepare an AZO slurry with a volume solid content of up to 51% and a viscosity as low as 100 centipoise slurry.

[0069] In the third step, the ball-milled slurry is poured into a flat plaster mold for molding to obtain a green AZO oxide ceramic target.

[0070] In the fourth step, the green ...

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Abstract

The invention discloses a method for preparing an oxide ceramic target material green body. Oxide slurry is obtained by utilizing a vacuum ball milling process, then grouting and forming are performed, a sintering process is also performed, and a drying process of the oxide target material green body can also be performed before the sintering process, wherein the vacuum degree of the vacuum ball milling process is 10Pa or lower, and the ball milling time is 48-72h. The oxide ceramic target material green body prepared by the method disclosed by the invention is large in size and simple in process, and high-density oxide target material green body with different shapes such as a cylindrical shape and a flat plate shape can be prepared.

Description

technical field [0001] The invention belongs to the field of preparation of ceramic materials, and in particular relates to a method for preparing an oxide ceramic target body. Background technique [0002] Oxide ceramic targets are mainly used in the production of transparent conductive oxide (TCO for short). In recent years, with the development of liquid crystal displays, touch panels, organic light-emitting displays, solar cells, etc., transparent conductive films have become one of the key materials. [0003] At present, the commonly used method of preparing oxide targets is to use molding and isostatic pressing to produce green bodies with uniform density, but the molds used are complicated and difficult to make, so it is not easy to prepare large-size high-density target green bodies. . [0004] In the prior art (such as CN205816478U, CN105965746A), there are devices and molds for forming cylindrical targets, but their structures are complicated and difficult to ope...

Claims

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Application Information

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IPC IPC(8): C04B35/01C04B35/453C04B35/626C04B35/622B28B1/26B28B7/18
CPCC04B35/01C04B35/457C04B35/622C04B35/6261B28B1/264B28B7/18C04B2235/77C04B2235/658C04B2235/6583C04B2235/656C04B2235/6022C04B2235/3286C04B2235/3284C04B2235/3217
Inventor 曾学云舒永春刘洋孙本双
Owner ZHENGZHOU UNIV
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