Three-dimensional super resolution microscopic imaging method and device based on variable angle total internal reflection structured light illumination
A technology of structured light illumination and total internal reflection, applied in the field of optical super-resolution microscopy imaging, can solve the problems of limited lateral resolution and diffraction of total internal reflection fluorescence microscopy
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[0061] see figure 2 The three-dimensional super-resolution microscopic imaging device of this embodiment includes a laser 1 and a single-mode optical fiber 2 arranged in sequence along the optical path of the light emitted by the laser 1, a first convex lens 3, a second convex lens 4, a first half-wave plate 5 and The first beam splitter 6. The first beam splitter 6 divides the light path into a transmission light path and a reflection light path, and a second half-wave plate 7, a transmission path vibrating mirror system 8, a second reflection mirror 9 and a first scanning lens 10 are sequentially arranged on the transmission light path. A light barrier 12, a first reflector 13, a reflective galvanometer system 15 and a second scanning lens 16 are arranged in turn on the reflected light path, and piezoelectric ceramics for driving the first reflector to change the reflection angle are mounted on the first reflector 13. 14. A second beam splitter is provided at the confluen...
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