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A multi-stage compound high vacuum dry pump

A high vacuum, dry pump technology, applied in the field of vacuum pumping, can solve the problems of strong performance and processing limitations of the composite vacuum dry pump, the backflow of the working medium contaminating the pumped container, affecting the quality and quantity of products, etc., to achieve stable and good pumping. Air effect, compact structure, low maintenance cost

Active Publication Date: 2020-03-24
NORTHEASTERN UNIV LIAONING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] With the development of science and technology and the expansion of vacuum application fields, there are two urgent problems to be solved in the original mechanical vacuum pump and the pumping system composed of it: one is that the working medium of the pump backflows and pollutes the pumped container, and this backflow Flow affects the quality, quantity of products in many cases and increases the maintenance cost of equipment
Although this kind of dry screw vacuum pump has no friction between the rotating parts, can run at high speed, the whole machine is small in size, simple in structure, and easy to maintain, but the pump needs a backing pump and is expensive
[0017] The performance and processing limitations of the above typical compound vacuum dry pumps are relatively strong. In order to solve the comprehensive problems of the above-mentioned types of compound vacuum pumps, it is urgent to invent a vacuum pump to achieve a wider working pressure from the high vacuum section to the atmospheric section. Maintain a sufficiently large and stable pumping speed within the range, while maintaining low manufacturing costs and achieving high reliability

Method used

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  • A multi-stage compound high vacuum dry pump
  • A multi-stage compound high vacuum dry pump
  • A multi-stage compound high vacuum dry pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0074] A multi-stage composite high vacuum dry pump adopts a horizontal structure, such as figure 1 As shown, it is specifically a five-stage traction three-stage vortex composite dry vacuum pump, which includes a pump casing 1, a built-in motor, a traction-stage rotor, a traction-stage stator, a vortex-stage rotor, a vortex-stage stator and two bases 2, wherein the built-in motor It is located on the left side of the pump casing 1 to provide the kinetic energy of the entire pump. The built-in motor includes a motor rotor 3, a motor stator 4 and a main shaft 5. The traction stage rotor and the vortex stage rotor are fixed on the main shaft 5, and the front end of the traction stage rotor is set There is an air inlet 6, and an inlet flange 7 is provided on the air inlet 6. The traction stage rotor is a circular sleeve, fixed on the middle tapered shaft section of the main shaft 5, and the traction stage stator corresponding to the traction stage rotor is Cylindrical, the tracti...

Embodiment 2

[0088] This embodiment is based on Example 1, providing a five-stage traction four-stage vortex compound high vacuum dry pump, such as Image 6 As shown, the vortex stage performs four-stage compression, and adopts two kinds of blade shapes. From high vacuum level to low vacuum level, two-stage T-shape and two-stage V-shape are adopted respectively, which can achieve higher pumping speed. The nitrogen purge valve 20 is arranged above the stator of the third vortex stage of the vortex stage. Compared with other direct-exhaust atmospheric high-vacuum dry pumps, it has good dynamic balance, small volume, short start-up time, and stable pumping performance. Under the condition that the pumping speed is determined by the inlet traction stage, the setting of multi-stage and different forms of vortex structures improves the efficiency. Overall ultimate vacuum and pumping stability.

Embodiment 3

[0090] This embodiment is based on Example 1, providing a five-stage traction and six-stage vortex compound high vacuum dry pump, such as Figure 7 As shown, the traction stage performs five-stage compression, the vortex stage performs six-stage compression, and adopts three types of blade shapes. Two-stage T-shape, two-stage V-shape, and two-stage C-shape are used respectively from high vacuum stage to low vacuum stage. The nitrogen purge valve 20 is set above the third-stage vortex stage stator of the vortex stage; it can operate in a wide pressure range Keep larger pumping speed in the interior, realize higher vacuum degree than example 2.

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Abstract

The invention relates to a multi-stage composite high vacuum dry pump, which includes a pump casing, a built-in motor, a traction-stage rotor, a traction-stage stator, a vortex-stage rotor, a vortex-stage stator and two bases, wherein the built-in motor is located on the On one side of the pump casing, the traction stage rotor is fixed on the main shaft of the built-in motor, and the traction stage stator is provided correspondingly. The vortex stage rotor is close to the traction stage rotor and is fixed on the main shaft through a shaft sleeve. The vortex stage stator is provided corresponding to the vortex stage rotor. , the vortex-stage rotor is provided with multiple stages, and the blades of the multi-stage vortex-stage rotor are T-shaped, V-shaped and C-shaped. The invention adopts a horizontal structure, which has the characteristics of compact structure, simple manufacturing process, good dynamic balance, strong resistance to atmospheric impact, and stable operation. Moreover, the inlet stage selects multi-stage traction stages in series, which is beneficial to improving the compression ratio and exhaust gas. Multi-stage vortex stages are selected in series to ensure a stable high pumping speed within a wide working pressure range and achieve the effect of direct discharge to the atmosphere.

Description

technical field [0001] The invention belongs to the technical field of vacuuming, and in particular relates to a multi-stage composite high-vacuum dry pump. Background technique [0002] With the development of science and technology and the expansion of vacuum application fields, there are two urgent problems to be solved in the original mechanical vacuum pump and the pumping system composed of it: one is that the working medium of the pump backflows and pollutes the pumped container, and this backflow The flow affects the quality, quantity of the product in many cases and increases the maintenance cost of the equipment. Secondly, due to the reaction substances in some processes, the medium in the vacuum pump is seriously deteriorated, so that the pump cannot work normally. In order to solve the above problems, dry vacuum pumps came into being. At present, there are some dry vacuum pumps on the market. Dry vacuum pumps are easy to maintain, easy to operate and can obtain ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D25/06F04D17/12F04D29/30F04D29/70F04D29/42
CPCF04D17/122F04D25/0606F04D29/30F04D29/4206F04D29/701
Inventor 刘坤王展威李昌龙王光玉张军段启惠巴要帅巴德纯
Owner NORTHEASTERN UNIV LIAONING