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Boron trichloride purification apparatus

A purification device, boron trichloride technology, applied in the direction of boron halide compounds, boron halides, etc., can solve the problems such as the degree of purification needs to be improved, achieve excellent adsorption effect, reduce energy consumption, and increase the effect of gas contact area

Inactive Publication Date: 2018-06-15
SHANGHAI HELI IND GAS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a boron trichloride purification device, which solves the problem that the purification degree of boron trichloride needs to be improved by using traditional methods

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  • Boron trichloride purification apparatus

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Embodiment Construction

[0021] In order to easily understand the technical means, creative features, purpose and effect of the present invention, the present invention will be further explained in conjunction with specific drawings below.

[0022] Such as figure 1 As shown, a boron trichloride purification device includes a raw material cylinder, a primary adsorber, a reaction remover, a secondary adsorber, an intermediate tank, a primary distillation tower, a secondary distillation tower, Condenser, product tank, the first-stage adsorber is a two-way parallel structure, the reaction remover is a two-way parallel structure, a cold and hot coil jacket is installed on the periphery of the intermediate tank, and the middle The residual waste liquid discharge outlet of the tank, the primary distillation tower and the secondary distillation tower are connected with a waste liquid tank.

[0023] The solid adsorbent in the primary adsorber is spherical activated carbon adsorbent.

[0024] The first-stage adsorbe...

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Abstract

The invention discloses a boron trichloride purification apparatus, and belongs to the technical field of boron trichloride purification. The apparatus comprises a raw material steel cylinder, a primary adsorber, a reaction remover, a secondary adsorber, an intermediate tank, a primary rectification tower, a secondary rectification tower, a condenser and a product tank which are sequentially connected, the primary adsorber is a two-channel parallel structure, the reaction remover is a two-channel parallel structure, a heating and cooling coil jacket is arranged in the outer periphery of the tank body of the intermediate tank, and the residual waste liquid discharging openings of the intermediate tank, the primary rectification tower and the secondary rectification are connected with a waste liquid tank. Adsorption, decomposition, reaction, distillation and condensation can gradually performed through above devices and process steps in order to reduce the content of harmful impurities in a boron trichloride raw material to 0.5 ppm or less and make the raw material fully meet the requirements of the LED industry and the chip industry.

Description

Technical field [0001] The invention relates to a boron trichloride purification device, belonging to the technical field of boron trichloride purification. Background technique [0002] High-purity boron trichloride is widely used as a dry etching gas in the LED industry and electronic chip industry, and it usually requires that the harmful impurities in the boron trichloride be less than 1ppm. In traditional boron trichloride BCl 3 In the purification process, where Cl 2 , HCl, COCl 2 , SiCl 4 Will dissolve in BCl 3 In the liquid phase, an azeotropic mixture is formed, which cannot be removed to 1 ppm by the traditional process of rectification. Since the media are all acidic substances, and conventional molecular sieves are all alkaline substances, conventional molecular sieves will also affect BCl 3 Produces a great adsorption effect, so it is difficult to remove HCl and Cl with conventional molecular sieves 2 , SiCl 4 And other ingredients. In order to make the harmful impu...

Claims

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Application Information

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IPC IPC(8): C01B35/06
CPCC01B35/061C01P2006/80
Inventor 王绍峻梁永强于青玉
Owner SHANGHAI HELI IND GAS CO LTD
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