Optical path structure of spatial heterodyne Raman imaging spectrometer

Abstract

The invention provides an optical path structure of a spatial heterodyne Raman imaging spectrometer. The optical path structure mainly comprises a collimating lens, a focusing lens, a first Raman light filter, a beam splitting prism, two wedged prisms, two blazed gratings, a second Raman light filter, an aspherical lens, an imaging lens set, an area array detector, an object stage, a beam expanderand a laser. Raman light emitted by a sample is focused on the blazed gratings on two arms of an interferometer after passing through the collimating lens, the focusing lens and the first Raman lightfilter, then combined again by the beam splitting prism to obtain spatial heterodyne Raman interference light, and finally received by the area array detector after passing through the second Raman light filter, the aspherical lens and the imaging lens set. Through adoption of the aspherical lens, the acquisition speed of each frame of the heterodyne Raman interference light acquired by the areaarray detector is effectively increased; through the optical path structure, rapid measurement of a Raman spectrum at each position on the surface of the sample to be detected is achieved; meanwhile,the optical path structure has the advantages of high resolution, large light flux, a wide measured waveband range and the like.

Description

technical field [0001] The invention relates to the technical field of spectral analysis instruments, in particular to an optical path structure of a spatial heterodyne Raman imaging spectrometer. Background technique [0002] Raman spectroscopy is a non-destructive and rapid detection method based on the Raman light scattered light generated by the interaction between light and matter. After the incident laser is irradiated to the measured object, it will excite the Raman scattered light which is not suppressed from the frequency of the incident laser and whose frequency is near the incident light. By analyzing the Raman scattered light, information related to the molecular system of the measured object can be obtained. According to the difference of the molecular structure or state of the object, the molecule has its corresponding characteristic Raman spectrum. Raman spectroscopy has the advantages of non-destructive, non-invasive, and no need for sample processing, so R...

AI Technical Summary

Problems solved by technology

However, in the existing Raman spectrometer technology, a focused laser spot is used to irradiate the sample, and the Raman spectrum is measured at a specific position on the sample; if the entire sample surface needs to be measured, one position point after another is required Point-by-point scanning of position points, the disadvantage of this method is that the measurement efficiency is low, and it is not suitable for rapid Raman measurement of the entire surface of the sample

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