Double-layer nanometer optical grating-based micro-nano gyroscope and processing method thereof

Abstract

The invention discloses a double-layer nanometer optical grating-based micro-nano gyroscope and a processing method thereof. The double-layer nanometer optical grating-based micro-nano gyroscope comprises a glass substrate, a supporting structure, a double-mass-block micro-resonator and a glass cover cap; the glass substrate, the supporting structure and the glass cover cap are connected with oneanother sequentially from bottom to top to form a cavity structure; the double-mass-block micro-resonator is arranged in the supporting structure; the double-mass-block micro-resonator comprises two groups of mass blocks, driving frames, decoupling beams and movable optical grating; the movable optical grating is arranged on the center part of each mass block; the driving frames are arranged at the periphery of the mass block; the decoupling beams are arranged at four corners of the periphery of the mass block; fixed optical grating is arranged at the bottom of the supporting structure under each piece of movable optical grating; electrode through holes are formed in the glass cover cap and corresponding to the position of the driving frame uniformly; and a metal welding pad connected withthe driving frame is arranged in each electrode through hole. The double-layer nanometer optical grating-based micro-nano gyroscope has the advantages of small mass, high measuring precision, insusceptibility to electromagnetic interference and convenience in batched production, and has wide application range and good market prospect.

Description

technical field [0001] The invention relates to a micro-nano gyroscope based on a double-layer nano-grating and a processing method thereof, belonging to the technical fields of micro-opto-electromechanical and inertial navigation. Background technique [0002] Micro-inertial devices are key devices for measuring the acceleration and angular velocity of objects, and are one of the MEMS (micro-mechanical systems) products, mainly including micro-machined accelerometers and micro-machined gyroscopes. Compared with traditional inertial devices, it has the characteristics of small size, low power consumption, low cost, and easy mass production, making it widely used in automotive consumer electronics, navigation and positioning, weapon guidance and other fields. [0003] At present, most MEMS gyroscopes adopt the scheme of Gothic effect and capacitance detection. In this solution, capacitance detection is easily disturbed by parasitic effects, and it is difficult to balance acc...

AI Technical Summary

Problems solved by technology

In this solution, capacitance detection is easily disturbed by parasitic effects, and it is difficult to balance accuracy and dynamic performance, which limits the application of MEMS gyroscopes in many fields that require high measurement accuracy

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