Method for producing opaque quartz glass, and blanks made from opaque quartz glass
A technology of transparent quartz and glass, which is applied in glass molding, glass manufacturing equipment, glass production, etc., and can solve problems such as undesired application of materials
Active Publication Date: 2022-05-10
HERAEUS QUARZGLAS
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Problems solved by technology
Differences in opacity are especially noticeable at small wall thicknesses in the form of localized, non-exactly reproducible inhomogeneities in the transmission and are undesirable for some material applications
Method used
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Embodiment Construction
[0072] The method according to the invention will now be explained by way of example with reference to the manufacture of flanges for quartz glass reactors for processing semiconductor wafers.
[0073] Production of Porous SiO 2 enhancer ( figure 2 )
[0074] Creates a homogeneous base slipstream1. For 10kg base material slipstream (SiO 2 - water slipstream) batch, 8.2 kg of amorphous quartz glass particles obtained by melting natural quartz raw material and having a particle size in the range between 250 μm and 650 μm 2 drum lined with quartz glass and having a capacity of approximately 20 liters Mix in a type mill where 1.8 kg of deionized water has a conductivity of less than 3 μS. The quartz glass particles 2 have been pre-cleaned in a thermal chlorination process; care has been taken to ensure that the cristobalite content is less than 1% by weight.
[0075] This mixture was ground on a roller slide at 23 rpm for 3 days with the aid of grinding beads of quartz gl...
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Abstract
The present application relates to a method for producing opaque quartz glass, and blanks produced from said opaque quartz glass. In a known method for the production of opaque quartz glass from 2 Particle and Rough SiO 2 The slip flow of the reinforcement produces a green body which is sintered in a sintering process to a blank made of the opaque quartz glass. has specific density D K1 The reinforcement is here embedded in a glass with a specific density D M SiO 2 in the matrix. Starting from this, in order to provide an opaque quartz glass blank which is less susceptible to cracking and exhibits a homogeneous transmission even at smaller wall thicknesses, it is proposed according to the invention to use a sinterable reinforcement which, after sintering Specific density D before treatment K0 lower than the glass specific density D M , and the sinterable reinforcement reaches the specific density D of the glass due to the sintering process M The specific density D differs by less than 10% K1 .
Description
technical field [0001] The present invention relates to a method for producing opaque quartz glass from 2 Particle and Rough SiO 2 The slip flow of the reinforcement produces a green body and sinters it to a blank made of opaque quartz glass by means of a sintering process. [0002] In addition, the present invention deals with SiO 2 The reinforcement is embedded in a glass with specific density D M Porous SiO 2 Opaque quartz glass blank in matrix. Background technique [0003] A method for producing opaque, closed-cell materials from opaque quartz glass is disclosed in DE 43 38 807 C1. For this purpose, naturally occurring quartz raw material is purified, fused by electrofusion into quartz glass, and the quartz glass is subsequently ground to SiO with a purity greater than 99.99% 2 Fine SiO 2 particle. This SiO 2 The particles had a particle size distribution with 80% of the particles having a size in the range of 355-2000 μm, 19% smaller than 355 μm and 1% larger ...
Claims
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IPC IPC(8): C03C3/06C03B20/00C03C1/02
CPCC03B20/00C03C1/026C03C3/06C03C1/006C03B19/066C03C2201/80C03C4/00Y02P40/57C03B2201/02
Inventor 克里斯蒂安·申克格里特·沙伊歇纳迪娜·彻利乔
Owner HERAEUS QUARZGLAS