A device for simultaneously generating ionization and displacement defect signals and its preparation method

A device and defect technology, which is applied in the field of devices that simultaneously generate ionization and displacement defect signals and their preparation, can solve problems such as damage to electronic devices on spacecraft, degradation of service life and reliability of spacecraft, etc. The effect of strong mobility and simple manufacturing process steps

Active Publication Date: 2022-03-04
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The radiation of high-energy charged particles is easy to damage the electronic devices on the spacecraft, resulting in a decrease in the service life and reliability of the spacecraft in orbit

Method used

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  • A device for simultaneously generating ionization and displacement defect signals and its preparation method
  • A device for simultaneously generating ionization and displacement defect signals and its preparation method
  • A device for simultaneously generating ionization and displacement defect signals and its preparation method

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Embodiment Construction

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0036] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0037] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0038] combine figure 1 Describe this embodiment mode, a device for simultaneously generating ionization and di...

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Abstract

The invention provides a device for simultaneously generating ionization and displacement defect signals for characterizing the formation and annealing state of different types of particle radiation-induced ionization and displacement defects, and a preparation method thereof, belonging to the field of nuclear science and technology. The present invention includes a collector region, a base region, n emitter regions, an emitter, a base and a collector; the doping concentration of the collector region is less than 1E15 / cm 3 The distance d from the long side of the outer edge of the base region to the outer edge of the collector region is in the range of 0.1 to 300 μm, and the distance e from the wide side of the outer edge of the base region to the outer edge of the collector region is in the range of 0.1 to 300 μm; the base region is doped The concentration is 1E15 / cm 3 ~1E17 / cm 3 ; The ratio of the long side a to the wide side b of the emission region is in the range of 500:1 to 1:500, and the depth of the diffusion junction is between 0.1 μm and 3.0 μm; the distance between two adjacent emission regions is not less than a / 2, Not more than 5a; the doping concentration of the emitter region is 5E15 / cm 3 ~1E20 / cm 3 .

Description

technical field [0001] The invention belongs to the field of nuclear science and technology, in particular to a device for simultaneously generating ionization and displacement defect signals and a preparation method thereof. Background technique [0002] During the in-orbit service of spacecraft, it will be affected by various space environments, among which the impact of space charged particle radiation environment is the most prominent. There are a considerable number of high-energy charged particles in the universe. Space high-energy particle environment generally means that the energy of electrons is greater than 40keV, the energy of protons or neutrons is greater than 1MeV, and the energy of heavy ions is greater than 1MeV / u. The energy of high-energy charged particles in the actual space radiation environment reaches tens of keV to hundreds of MeV, which will pose a serious threat to orbiting spacecraft. The radiation of high-energy charged particles is easy to dama...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/06H01L29/41H01L29/739
CPCH01L29/0642H01L29/41H01L29/739
Inventor 李兴冀杨剑群刘超铭刘勇
Owner HARBIN INST OF TECH
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