Surface roughness measurement method and device

A surface roughness and roughness technology, applied in the field of optical measurement, can solve the problems of low efficiency, strict measurement environment requirements and high equipment cost

Inactive Publication Date: 2018-07-20
UNIV OF SCI & TECH BEIJING
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The traditional contact measurement method has the disadvantages of low efficiency and easy damage to the surface, which can no longer meet the actual needs; while non-contact methods such as interference...

Method used

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  • Surface roughness measurement method and device
  • Surface roughness measurement method and device
  • Surface roughness measurement method and device

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Embodiment Construction

[0043] The measuring device such as figure 1 As shown, it consists of a microscopic imaging system 1 , a multi-light source spherical lampshade 2 , an object stage 3 and its fine-tuning device 4 , a computer 5 , and a control module 6 .

[0044] The multi-light source spherical lampshade 2 is hemispherical and fixed on the machine base. The inner spherical surface 2a is made of black non-reflective material, and n≥3 point light sources 2b are evenly distributed on the inner spherical surface, and are installed on the latitude ring of the multi-light source spherical lampshade.

[0045] The stage 3 is located at the spherical center of the multi-light source spherical lampshade, the plane of the stage is perpendicular to the axis of the multi-light source spherical lampshade, and is fixed on the machine base through the fine-tuning device 4 .

[0046] The microscopic imaging system 1 is composed of a high-resolution camera 1a and a long-object-distance microscope lens 1b. The o...

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Abstract

The invention relates to a surface roughness measurement method and a realization device. The method is characterized by using a high-resolution microscopic camera which is equipped with a long objectdistance microscopic lens to shoot the surface image of a measured object when a single point light source irradiates, wherein after n point light sources are successively lightened, the camera can shoot n surface images I1-In, and the n is greater than or equal to 3; using a high-light black ball to calibrate the direction of the light source and acquiring the unit direction vector L1-Ln of allthe light sources and the transformation ratio coefficient f of a world coordinate (x, y, z) and an image coordinate (u, v); calculating the image coordinate value W(u,v) of a surface depth through the unit direction vector L1-Ln of the light source and the two-dimensional image I1-In of the surface of the measured object; acquiring the world coordinate value Z(x, y) of the surface depth of the measured object through the transformation ratio coefficient f; selecting the appropriate sampling length lr, and sampling the Z(x, y) to acquire a contour curve z(x); using a gaussian filter to filterthe contour curve z(x) so as to obtain a gaussian center line w(x), and separating a roughness profile r(x); and calculating the arithmetic average deviation value of the roughness profile r(x) and taking as the measured value of roughness.

Description

technical field [0001] The invention relates to a method for measuring surface roughness and a device for realizing it, belonging to the field of optical measurement. Through a high-resolution microscopic camera equipped with a long-object-distance microscope lens and n≥3 point light sources with different incident angles, multiple images of the measured object illuminated by light sources with different incident angles are collected, and the measured object is detected according to the principle of photometric stereo vision Carry out three-dimensional reconstruction of the surface, and calculate the arithmetic mean deviation of the roughness profile according to the national standard value, as a measure of surface roughness. Background technique [0002] Surface roughness is one of the main precision indicators for evaluating the surface quality of mechanical parts. With the development and progress of modern science and technology, the quality of industrial products is ...

Claims

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Application Information

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IPC IPC(8): G01B11/30
CPCG01B11/30
Inventor 徐科周鹏吕煜颜志成王磊
Owner UNIV OF SCI & TECH BEIJING
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