Surface roughness measurement method and device
A surface roughness and roughness technology, applied in the field of optical measurement, can solve the problems of low efficiency, strict measurement environment requirements and high equipment cost
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[0043] The measuring device such as figure 1 As shown, it consists of a microscopic imaging system 1 , a multi-light source spherical lampshade 2 , an object stage 3 and its fine-tuning device 4 , a computer 5 , and a control module 6 .
[0044] The multi-light source spherical lampshade 2 is hemispherical and fixed on the machine base. The inner spherical surface 2a is made of black non-reflective material, and n≥3 point light sources 2b are evenly distributed on the inner spherical surface, and are installed on the latitude ring of the multi-light source spherical lampshade.
[0045] The stage 3 is located at the spherical center of the multi-light source spherical lampshade, the plane of the stage is perpendicular to the axis of the multi-light source spherical lampshade, and is fixed on the machine base through the fine-tuning device 4 .
[0046] The microscopic imaging system 1 is composed of a high-resolution camera 1a and a long-object-distance microscope lens 1b. The o...
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