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Method for manufacturing ultra-thin coil by using thin film deposition technology and ultra-thin coil

A technology of thin film deposition and thin film deposition device is applied in the field of ultra-thin coil manufacturing method and its composition structure, which can solve the problems of difficulty in coils, difficult control of electromagnetic signal test accuracy, etc. The effect of improved uniformity

Pending Publication Date: 2018-07-20
宁波市计量测试研究院
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the limitations of the wire diameter and winding technology of enameled wire, the thickness of conventional coils is basically on the macro scale, that is, usually above millimeters. When the thickness of the coil becomes smaller, it becomes more and more difficult to wind the coil by hand. , and the test accuracy of the electromagnetic signal is also difficult to control

Method used

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  • Method for manufacturing ultra-thin coil by using thin film deposition technology and ultra-thin coil
  • Method for manufacturing ultra-thin coil by using thin film deposition technology and ultra-thin coil
  • Method for manufacturing ultra-thin coil by using thin film deposition technology and ultra-thin coil

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Utilize a flexible substrate to deposit a thin film, then etch and process to make an ultra-thin coil for magnetic measurement

[0039] Select a long strip-shaped insulating substrate 1, which uses polyimide flexible substrate. GB / T 13542.6-2006 divides electrical insulating polyimide flexible substrate into 7.5μm and 13μm according to the nominal thickness. , 20 μm, 25 μm, 40 μm, 50 μm, 75 μm, 100 μm, and 125 μm. In this embodiment 1, a polyimide flexible substrate with a thickness of 20 μm and a width of 10 mm is selected as the insulating substrate 1. The polyimide flexible substrate passes through figure 2 As shown, a pair of horizontally placed and adjustable rotating reels 3 in the same direction and at the same speed perform uniform scrolling motion, and a thin film deposition device 4 is arranged between the pair of reels, and the magnetron sputtering coating technology is used to A single-layer conductive film with a thickness of 10 μm is deposited on the surf...

Embodiment 2

[0041] Deposit insulating material and conductive material to make a double-layer film, and then radially thin to obtain the desired ultra-thin coil

[0042] Thin film deposition devices 4 are respectively provided on both sides of the vertically placed mandrel support 5, and the two film deposition devices simultaneously deposit the insulating substrate 1 and the conductive film 2 alternately layer by layer on the outer surface of the rotating mandrel support 5 to obtain a double-layer film. , the insulating substrate 1 is made of an insulating film represented by alumina, and the conductive film 2 is also made of a metal conductive film represented by a copper film or other conductive materials that can be used for deposition; the cross-section can be obtained by radial cutting and etching technology. "Swirl" coil, and then use the copper film as the conductive layer to connect the wires to obtain the required electromagnetic coil, and finally fix the coil and remove the mand...

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Abstract

The invention, which belongs to the ultra-thin coil manufacturing technology for detecting or generating an electromagnetic signal, discloses a method for manufacturing an ultra-thin coil by using a thin film deposition technology and an ultra-thin coil. The method comprises steps of selecting a mandrel holder, carrying out deposition of a film, carrying out layer-by-layer convolution, carrying out micromachining thinning processing and removing the mandrel holder and the like; and thus an ultra-thin coil with the micron-order thickness is obtained. According to the manufacturing method, the thin film deposition technology and winding mode are used for replacing the traditional manual enameled wire winding model; and the technique is simple and is easy to operate and the accuracy and consistency of the coil size are ensured. Radial cutting and grinding are carried out to obtain an ultra-thin coil with the adjustable thickness and thus the wire diameter and the overall coil thickness reach the level above the micro order; the coil size and thickness can be controlled accurately; and the high consistency between the coil and the line distance can be ensured. Besides, the manufacturedultra-thin coil is in a shape like a circular ring and has a rectangular cross section formed by axial cutting along a circular ring shape, wherein the cross section is different from the circular cross section of the conventional enameled wire; and the usage performance is improved.

Description

technical field [0001] The invention relates to a method for manufacturing an ultra-thin coil for detecting electromagnetic signals and its composition structure, in particular to a method for manufacturing an ultra-thin coil by using thin film deposition technology and the ultra-thin coil. Background technique [0002] In recent years, with the miniaturization and precision of electronic devices, the requirements for electromagnetic signal control of small-sized samples are getting higher and higher, and coils are an important tool for detecting electromagnetic signals; usually, coils are mainly obtained by winding enameled wires. . However, due to the limitations of the wire diameter and winding technology of enameled wire, the thickness of conventional coils is basically on the macro scale, that is, usually above millimeters. When the thickness of the coil becomes smaller, it becomes more and more difficult to wind the coil by hand. , and the test accuracy of the electro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R29/08G01R3/00
CPCG01R3/00G01R29/0878
Inventor 高伟波王顺杰
Owner 宁波市计量测试研究院