Gas pressure sensor device based on conduction properties of graphene

Abstract

The invention provides a device for measuring the pressure of a gas in a closed container in allusion to a current situation that it is difficult to pressure the pressure of a gas in in the closed container. A pressure sensor closed container device is composed or a cylindrical container, a low pressure gas, a circular monocrystalline silicon plate and a graphene film. A bridge circuit signal extraction device is composed of a power supply, a resistor, an ammeter, a voltmeter, a switch and a wire. The circular monocrystalline silicon plate and the graphene film are bent towards the internal part of the container under the action of the low pressure gas, the length of the graphene film changes, the resistance of the graphene film changes along the length, corresponding current and voltage changes are formed on the bridge circuit signal extraction circuit, change signals are collected, the resistance variation of the graphene film can be obtained through transformation, and gas pressurein the container is obtained.

Description

technical field [0001] The patent of the invention relates to a gas pressure detection device, in particular to a gas pressure measurement device, which belongs to the field of pressure sensors. Background technique [0002] Pressure sensors are widely used in automotive systems, industrial process control, medical diagnostics and monitoring, and environmental monitoring. In pressure sensors, film thickness is the main factor determining the sensitivity of the pressure sensor. Deformable thin films of single crystal silicon are one of the most widely used materials. However, the integration of piezoresistive sensors on single crystal silicon thin films has the problems of complex processing and high cost. The resistance consistency of piezoresistive sensors is difficult to ensure accurately, which has become a difficult problem restricting the improvement of single crystal silicon thin film pressure sensor technology. Graphene film has the advantages of ultra-thin and sup...

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Problems solved by technology

[0004] Aiming at the current situation that the gas pressure in the airtight container is difficult to measure, the present invention proposes a gas pressure measuring device in the airtight container

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