Microstructure design method for capacitive pressure sensor with microstructure dielectric layer

Abstract

The invention discloses a microstructure design method for a capacitive pressure sensor with a microstructure dielectric layer, and belongs to the field of flexible pressure sensors. By combination ofAbaqus capable of solving a complicated nonlinear problem and large-sized COMSOL Multiphysics, the microstructure design method simulates a capacitive response of a microstructured capacitive pressure sensor under the action of external voltage; a simulation result is basically matched with an experimental result; compared with a previous simulation result, the simulation result has substantiallyimproved accuracy. The shape and the size of the microstructure are designed by changing parameters such as the elastic modulus, the bottom edge length, the angle, the height and the size of the microstructure of the dielectric layer, so that an influence rule of all the parameters on the linearity and the sensitivity of the sensor is obtained, and a basis is provided for optimization of the microstructure of the sensor. The microstructure design method disclosed by the invention is applicable to structural design and performance optimization of the microstructured capacitive sensors of shapes such as a prismatic shape, a cylindrical shape, a pyramid shape and a conical shape; the design method is high in accuracy, convenient and quick.

Description

technical field [0001] The invention belongs to the field of flexible pressure sensors, and relates to a sensor performance optimization realized by designing the microstructure of the dielectric layer of the capacitance pressure sensor, which is suitable for the capacitance pressure sensor with the dielectric layer of the microstructure arranged periodically. Background technique [0002] With the development of wearable electronic devices and intelligent robots, various new devices based on flexible pressure sensors are growing rapidly. The sensing principles mainly include piezoresistive, capacitive, piezoelectric and optical. Among them, the capacitive pressure sensor has the advantages of high sensitivity, large dynamic range, fast response and simple structure, and is widely used. [0003] A flat capacitive pressure sensor generally consists of two plates, namely a driving plate and a sensing plate. One of the plates is processed on the substrate material, and the su...

AI Technical Summary

Problems solved by technology

Although COMSOL can simulate the capacitance of capacitors, it is difficult to meet the accuracy requirements due to the deformation response of complex nonlinear contact problems, and they only use COMSOL to simulate the deformation process and capacitance change process of the entire sensor under external pressure, so the obtained capacitance response The curves do not exhibit realistic nonlinearities, and accurate sensitivity and linearity cannot be derived based on simulation results

On the other hand, Abaqus has powerful mechanical simulation capabilities and can solve complex nonlinear problems, but it does not have the function of calculating capacitance

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