Unlock instant, AI-driven research and patent intelligence for your innovation.

Atomic cavity preparation method

An atomic cavity, pre-packaged technology, used in instruments using atomic clocks, coupling of optical waveguides, fabrication of microstructure devices, etc.

Active Publication Date: 2020-01-03
TSINGHUA UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Based on this, it is necessary to provide a method for preparing an atomic cavity to address the current need for a highly airtight atomic cavity

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Atomic cavity preparation method
  • Atomic cavity preparation method
  • Atomic cavity preparation method

Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0054] See figure 1 , the embodiment of the present application provides a preparation method of an atomic cavity, comprising the following steps:

[0055] S100, providing a prepackaged atomic cavity structure 100, the prepackaged atomic cavity includes a main body 110, and at least one blind hole 112 opened in the main body 110, the main body 110 has a packaging surface 114, and the blind hole 112 is in The packaging surface 114 is opened;

[0056] S200, providing the packaging substrate 200, and cleaning the packaging substrate 200 and the pre-packaged atomic cavity structure 100 for standby;

[0057] S300, providing the filled object 400, and filling the filled object 400 into the blind hole 112 in a vacuum environment or a buffer gas atmosphere;

[0058] S400, in a vacuum environment or a buffer gas atmosphere, cover the packaging surface 114 with the packaging substrate 200 and close the blind holes 112, and apply contact pressure to the packaging substrate 200 and the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a preparation method of an atom cavity. The preparation method comprises the following steps: providing a prepackaged atom cavity structure and a packaged base, and cleaning thepackaged base and the prepackaged atom cavity structure for later use; providing a filled material, and filling a blind hole with the filled material; covering the prepackaged atom cavity structure by the packaged base, and applying contact pressure; heating the prepackaged atom cavity structure and the packaged base to apply bonding voltage between the prepackaged atom cavity structure and the packaged base, so as to obtain a pre-bonded atom cavity; heating the prepackaged atom cavity structure and the packaged base in a buffer gas atmosphere to apply the bonding voltage between the prepackaged atom cavity structure and the packaged base; and after the bonding is completed, cutting off the bonding voltage, stopping heating, removing the pressure, and naturally cooling the cavity to roomtemperature. According to the preparation method of the atom cavity, the prepackaged atom cavity structure and the packaged base are pre-bonded firstly, and then are bonded once in buffer gas, so thatthe bonding strength and the air tightness of the atom cavity can be improved, and the problem that air enters the atom cavity due to low bonding strength of the pre-bonded atom cavity also can be effectively avoided.

Description

technical field [0001] The present application relates to the field of manufacturing and packaging of atomic devices, in particular to a method for preparing an atomic cavity. Background technique [0002] The combination of atomic physics technology and MEMS technology has produced a variety of new technologies, such as miniature atomic clocks, miniature atomic magnetometers, miniature atomic gyroscopes and other miniature atomic cavity devices. [0003] Atomic clocks are widely used due to their high accuracy and stability, and have broad application prospects in astronomy, aerospace, synchronous communication networks, satellite navigation, geodesy and basic scientific research. Miniaturization is one of the major development trends of atomic clocks. The miniature atomic clock is a miniature atomic cavity device that is currently being researched and developed very actively. [0004] In the miniature atomic clock technology based on MEMS technology, the miniature gas at...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/00B81B7/02B81C1/00G04F5/14
CPCB81B7/00B81B7/02B81C1/00047G04F5/14
Inventor 阮勇尤政亓建莹
Owner TSINGHUA UNIV