Method for directional etching of copper foil for graphene transfer

Abstract

The invention discloses a method for directionaldirectionally corroding of a copper foil in the graphene transfer process. The method comprises the following steps of rotationallyspin coating PMMA (polymethyl methacrylate) to the surface of graphene to form a protecting layer, heating and curing PMMA, and forming a PMMA-graphene-copper foil; preparing a corrosion solution for corroding copper, andloading voltage to the corrosion solution to form an electric field; drifting the PMMA-graphene-copper foil onto the liquid level of the corrosion solution, and forming PMMA-graphene; after the corrosion of the copper foil is completed, picking up the PMMA-graphene out of the solution, putting into deionized water, and cleaning; after water is drained, heating a substrate, removing the remained water between the substrate and the graphene, and enhancing the bonding between the graphene and the substrate; using an organic solvent to remove the PMMA at the surface of the graphene, so as to obtain a graphene-substrate sample; using isopropanol to clean the surface of the graphene-susbtrate sample, and airing. The method can avoid the damage to the graphene because of the copper coil is dissolved into small blocks.

Description

technical field [0001] The invention belongs to the field of graphene transfer, in particular to a polymer protection wet transfer graphene method. Background technique [0002] Graphene, a new type of two-dimensional thin-film carbon material, has rapidly set off a wave of graphene research in the world because of its excellent properties beyond many materials. So far, the preparation methods of graphene and the research on its mechanical, electrical, chemical and other aspects have made very good progress. However, if graphene is to be applied to other devices, it is necessary to use the CVD method to grow large-scale continuous graphene films, but the graphene grown by the CVD method cannot be used directly on the copper substrate, so a corresponding transfer method is required to transfer the graphene onto the target substrate. [0003] The traditional transfer method is also called liquid-phase corrosion method, and its specific transfer process is: 1. Use polymethylm...

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Problems solved by technology

[0004] The main problems in the liquid phase etching method are as follows: when the copper foil is corroded freely, due to its random dissolution characteristics, a whole piece of copper foil will be dissolved into multiple small pieces, and these small pieces of copper foil will drift relatively under the action of liquid tension. leading to damage to the graphene film

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