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Piezoelectric film sensor and its preparation method

A piezoelectric film and sensor technology, applied in piezoelectric/electrostrictive/magnetostrictive devices, circuits, electrical components, etc.

Active Publication Date: 2019-09-20
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Based on this, it is necessary to provide a piezoelectric thin film sensor and its preparation method for the problems of microstructure and substrate adhesion, improving the yield and sensitivity of piezoelectric thin film sensors

Method used

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  • Piezoelectric film sensor and its preparation method
  • Piezoelectric film sensor and its preparation method
  • Piezoelectric film sensor and its preparation method

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Embodiment Construction

[0053]In order to make the purpose, technical solution and advantages of the present application clearer, the piezoelectric film sensor 10 of the present application and its preparation method will be further described in detail through the following examples and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the present application, not to limit the present application.

[0054] The manufacturing method of the piezoelectric film sensor 10 according to the embodiment of the present application will be described in detail below with reference to the accompanying drawings.

[0055] Please see attached figure 1 , the embodiment of the present application provides a method for preparing a piezoelectric film sensor 10, the method for preparing the piezoelectric film sensor 10 includes:

[0056] S100, providing a piezoelectric film layered structure 100, the piezoelectric film layered stru...

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Abstract

The present application provides a piezoelectric film sensor and a preparation method thereof. The preparation method of the piezoelectric thin film sensor includes providing a piezoelectric thin film layered structure. The piezoelectric thin film layered structure includes a substrate, a first insulating layer, a piezoelectric thin film device and a second insulating layer. The part of the second insulating layer opposite to the piezoelectric thin film device is removed by dry etching, and part of the second surface is exposed. Etching the leaking part of the second surface, the etching depth is equal to the thickness of the substrate.

Description

technical field [0001] The application relates to the field of micro-electromechanical systems, in particular to a piezoelectric film sensor and a preparation method thereof. Background technique [0002] Piezoelectric thin film sensors are a branch that develops rapidly in the field of MEMS. The piezoelectric principle is another new way to realize the position sensor. Through the piezoelectric effect, the perceived quantities such as stress and acceleration can output voltage on the piezoelectric film, and the inverse piezoelectric effect enables the microsensor to drive the microstructure to generate displacement by applying an external voltage. In fact, microsensors made of piezoelectric thin film materials have incomparable advantages over existing silicon-based microsensors. It is a new field of microsensor research and development. [0003] The sensor based on the piezoelectric effect is a self-generating and electromechanical conversion sensor. Its sensitive elem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/332H01L41/113H10N30/082H10N30/30
CPCH10N30/302H10N30/082
Inventor 阮勇尤政王群郑烁
Owner TSINGHUA UNIV